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X-ray photoelectron and auger spectroscopic study of the chemical composition of BC x N y films

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Abstract

X-ray photoelectron and Auger spectroscopy are used to investigate the chemical composition of BC x N y films synthesized by PECVD from different initial gas mixtures in the temperature range 473–723 K. Main principles and features of the film formation are found. It is shown that the chemical composition of BC x N y films significantly depends on the synthesis parameters, which enables targeted control of their physical properties. The obtained data are discussed.

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Authors and Affiliations

  1. A. V. Rzhanov Institute of Semiconductor Physics, Siberian Division, Russian Academy of Sciences, Novosibirsk, Russia

    V. G. Kesler

  2. A. V. Nikolaev Institute of Inorganic Chemistry, Siberian Division, Russian Academy of Sciences, Novosibirsk, Russia

    M. L. Kosinova, Yu. M. Rumyantsev & V. S. Sulyaeva

Authors
  1. V. G. Kesler
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  2. M. L. Kosinova
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  3. Yu. M. Rumyantsev
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  4. V. S. Sulyaeva
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Correspondence to V. G. Kesler.

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Original Russian Text Copyright © 2012 by V. G. Kesler, M. L. Kosinova, Yu. M. Rumyantsev, V. S. Sulyaeva

Devoted to the Jubilee of Academician F. A. Kuznetsov

__________

Translated from Zhurnal Strukturnoi Khimii, Vol. 53, No. 4, pp. 710–717, July–August, 2012.

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Kesler, V.G., Kosinova, M.L., Rumyantsev, Y.M. et al. X-ray photoelectron and auger spectroscopic study of the chemical composition of BC x N y films. J Struct Chem 53, 699–707 (2012). https://doi.org/10.1134/S0022476612040129

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  • DOI: https://doi.org/10.1134/S0022476612040129

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