Abstract
An experimental device that allows the determination of the thicknesses of thin metal films in the micron range is described. The method is based on the use of the dependence of the phase velocity of harmonic antisymmetric Lamb waves that propagate along a film on its thickness. The measurement accuracy was 8% and was virtually independent of the film thickness.
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Original Russian Text © Kh.B. Tolipov, D.G. Kleshchev, V.M. Berezin, 2017, published in Pribory i Tekhnika Eksperimenta, 2017, No. 2, pp. 137–139.
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Tolipov, K.B., Kleshchev, D.G. & Berezin, V.M. The use of lamb waves for measuring the thicknesses of thin metal films. Instrum Exp Tech 60, 284–286 (2017). https://doi.org/10.1134/S0020441217020142
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DOI: https://doi.org/10.1134/S0020441217020142