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A plasma generator based on nonself-sustained low-pressure glow discharge with a large-volume hollow cathode

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Abstract

The results of studying nonself-sustained glow discharges in an electrode system with a hollow cathode with a volume of 0.25 m3 are presented. A high-current (up to 35 A) nonself-sustained glow discharge at low pressures (0.3–1.0 Pa) is initiated and sustained with the help of an auxiliary cold-hollow-cathode arc discharge. When the current of a nonself-sustained glow discharge increases from 2 to 35 A, its burning voltage changes from 40 to 300 V. These values are much lower than the voltage for a self-sustained glow discharge in the same electrode system. At a discharge current of 30 A, the electron concentration at the center of the hollow cathode is n e ∼ 1010–1011 cm−3 and the electron temperature is T e ≈ 2 eV. The discharge considered can be used in the system for modification of materials and products.

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Authors and Affiliations

  1. Institute of High Current Electronics, Siberian Branch, Russian Academy of Sciences, Akademicheskii pr. 2/3, Tomsk, 634055, Russia

    I. V. Lopatin, Yu. Kh. Akhmadeev, N. N. Koval’ & P. M. Shchanin

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  1. I. V. Lopatin
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  2. Yu. Kh. Akhmadeev
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  3. N. N. Koval’
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  4. P. M. Shchanin
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Correspondence to I. V. Lopatin.

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Original Russian Text © I.V. Lopatin, Yu.Kh. Akhmadeev, N.N. Koval’, P.M. Shchanin, 2011, published in Pribory i Tekhnika Eksperimenta, 2011, No. 1, pp. 151–156.

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Lopatin, I.V., Akhmadeev, Y.K., Koval’, N.N. et al. A plasma generator based on nonself-sustained low-pressure glow discharge with a large-volume hollow cathode. Instrum Exp Tech 54, 141–146 (2011). https://doi.org/10.1134/S0020441211010179

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  • DOI: https://doi.org/10.1134/S0020441211010179

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