Abstract
A method of microtomography of layered microstructures during detection of backscattered electrons in a scanning electron microscope is described. This method is based on the formation of layer-by-layer images hidden under the surfaces of microstructures using reflected electrons filtered within a narrow energy window. An improved deflector-type spectrometer with toroidal electrostatic sector electrodes is applied for microtomography and spectroscopy. To improve the sharpness and accuracy of separation of individual buried heteroboundaries, the modulation principle of video-signal detection is implemented.
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Original Russian Text © A.V. Gostev, S.A. Ditsman, F.A. Luk’yanov, N.A. Orlikovskii, E.I. Rau, R.A. Sennov, 2010, published in Pribory i Tekhnika Eksperimenta, 2010, No. 4, pp. 124–134.
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Gostev, A.V., Ditsman, S.A., Luk’yanov, F.A. et al. A method and devices of electron microtomography in scanning electron microscopy. Instrum Exp Tech 53, 581–590 (2010). https://doi.org/10.1134/S0020441210040202
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DOI: https://doi.org/10.1134/S0020441210040202