Abstract
A compact source of gas, vapor, metal, and carbon ions based on a cold-hollow-cathode reflective discharge has been developed, in which a 6-mm-diameter flat target (Cu, Mo, W, C) is installed on the bottom of the cold cathode insulated from it. The density of the ion flow from cathode plasma reaches 100 mA/cm2 at an accelerating voltage of up to 10 kV and a discharge current of 0.2-0.5 A. Vapors produced during ion sputtering of the target are ionized in the cathode and anode cavities. A beam containing ions of the plasma-producing gas and vapor is extracted throug h the channel in the reflector cathode. A fraction of the vapor of the sputtered target, the flow of which is sufficient for growing layers at a rate of ∼0.03 nm/s at a distance of 10 cm from the emission channel under the action of an ion beam, is extracted together with ions. The fraction of metal ions in the extracted beam is 0.05-0.10. The total current of the ion beam is 20-30 mA.
This is a preview of subscription content, log in via an institution to check access.
Similar content being viewed by others
References
Semenov, A.P., Prib. Tekh. Eksp., 1990, no. 4, p. 26.
Semenov, A.P., Prib. Tekh. Eksp., 1993, no. 2, p. 11.
Semenov, A.P., Prib. Tekh. Eksp., 1996, no. 4, p. 3.
Semenov, A.P., Zh. Tekh. Fiz., 2005, vol. 75, no. 4, p. 42 [Tech. Phys. (Engl. Transl.), vol. 75, no. 4].
Glazov, A.A., Kuzmyak, M., Novikov, D.L., et al., Prib. Tekh. Eksp., 1964, no. 1, p. 34.
Semenov, A.P., Prib. Tekh. Eksp., 1984, no. 5, p. 23.
Semenov, A.P. and Mokhosoev, M.V., Teplofiz. Vys. Temp., 1984, vol. 22, no. 1, p. 164.
Semenov, A.P., Zh. Tekh. Fiz., 2007, vol. 77, no. 2, p. 131 [Tech. Phys. (Engl. Transl.), vol. 77, no. 2].
Semenov, A.P., Puchki raspylyayushchikh ionov:poluche-nie i primenenie (Sputtering Ion Beams: Obtaining and Application), Ulan-Ude: BNTs SO RAN, 1999.
Kreindel’, Yu.E., Plazmennye istochniki elektronov (Plasma Electron Sources), Moscow: Atomizdat, 1977.
Kanaya, K., Hojou, K., Koga, K., and Toki, K., J. Appl. Phys., 1973, vol. 12, no. 9, p. 1297.
Gruzdev, V.A. and Rempe, N.G., in Tez. dokl. I Vse-soyuz. soveshchaniya po plazmennoi emissionnoi elek-tronike (Proc. of I All-Russia Conf. on Plasma Emission Electronics), Ulan-Ude, 1991, p. 45.
Gabovich, M.D., Fizika i tekhnika plazmennykh istoch-nikov ionov (Physics and Technology of Plasma Ion Sources), Moscow: Atomizdat, 1972.
Shamim, M.M., Scheuer, J.T., Fetherston, R.P., et al., J. Appl. Phys., 1991, vol. 70, no. 9, p. 4756.
Levitskii, S.M., Sbornik zadach i raschetov po fiz-icheskoi elektronike (Collected Problems and Calculations on Physical Electronics), Kiev: Kiev. Univer., 1964.
Semenov, A.P., Semenova, I.A., and Troyan, G.V., Plazmennaya emissionnaya elektronika. Trudy III Mezhdunar. kreindelevskogo seminara (Plasma Emission Electronics, Proc. of III Int. Kreindel Seminar), Ulan-Ude: BNTs SO RAS, 2009, p. 100.
Kornilov, S.Yu., Osipov, I.V., and Rempe, N.G., Prib. Tekh. Eksp., 2009, no. 3, p. 104 [Russ. J. Nondestr. Test. (Engl. Transl.), 2007, vol. 43, no. 4, p. 406].
Author information
Authors and Affiliations
Corresponding author
Additional information
Original Russian Text © A.P. Semenov, I.A. Semenova, 2010, published in Pribory i Tekhnika Eksperimenta, 2010, No. 3, pp. 139–143.
Rights and permissions
About this article
Cite this article
Semenov, A.P., Semenova, I.A. A source of gas, vapor, metal, and carbon ions based on a low-pressure hollow-cathode discharge. Instrum Exp Tech 53, 449–453 (2010). https://doi.org/10.1134/S0020441210030231
Received:
Accepted:
Published:
Issue Date:
DOI: https://doi.org/10.1134/S0020441210030231