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A device for liquid-phase epitaxy

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Abstract

An improved slider-type graphite cassette for liquid phase epitaxy in a horizontal reactor is described. The cassette ensures the complete removal of the remains of the solution-melt from the surface of an epitaxial layer owing to precise adjustment of the gap height between the layer surface and the edge of the lower surface of the cassette stator. The gap height is determined by measuring the gas flow passing through the gap with a gas rotameter. The quality of the surface of InSb layers grown with the new cassette is compared to the quality of layers obtained in an ordinary cassette.

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Authors and Affiliations

  1. Abdullaev Institute of Physics, National Academy of Sciences of Azerbaijan, pr. Javida 33, Baku, 370143, Azerbaijan

    Sh. O. Eminov & A. A. Radjabli

Authors
  1. Sh. O. Eminov
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  2. A. A. Radjabli
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Correspondence to Sh. O. Eminov.

Additional information

Original Russian Text © Sh.O. Eminov, A.A. Radjabli, 2010, published in Pribory i Tekhnika Eksperimenta, 2010, No. 2, pp. 153–155.

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Eminov, S.O., Radjabli, A.A. A device for liquid-phase epitaxy. Instrum Exp Tech 53, 298–300 (2010). https://doi.org/10.1134/S0020441210020260

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  • DOI: https://doi.org/10.1134/S0020441210020260

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