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An electrostatic deflection system

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Abstract

The system for electrostatic deflection of high-energy (up to 10 keV) ion beams at large (up to 7°) angles contains a dodecapole assembly consisting of 12 electrodes and a two-channel deflection voltage source. Each channel generates two voltages symmetrically changing from −600 to +600 V with respect to the ground, and, in this case, the absolute values of the both voltages differ by ≤1 V. The temperature voltage drift is ≤50 ppm/°C. Output voltage levels are set by a 16-bit digital-to-analog converter. The deflection-voltage source is a 95 × 65 × 40-mm module.

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References

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Authors and Affiliations

  1. Kurdyumov Institute for Metal Physics, National Academy of Science of Ukraine, bul’v. Vernadskogo 36, Kiev, 03142, Ukraine

    V. T. Cherepin & V. I. Vasilenko

  2. Physical Engineering Teaching Research Center, National Academy of Science of Ukraine, bul’v. Vernadskogo 36, Kiev, 03142, Ukraine

    T. A. Krasovskii & E. A. Polubot’ko

Authors
  1. V. T. Cherepin
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  2. V. I. Vasilenko
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  3. T. A. Krasovskii
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  4. E. A. Polubot’ko
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Additional information

Original Russian Text © V.T. Cherepin, V.I. Vasilenko, T.A. Krasovskii, E.A. Polubot’ko, 2007, published in Pribory i Tekhnika Eksperimenta, 2007, No. 5, pp. 138–141.

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Cherepin, V.T., Vasilenko, V.I., Krasovskii, T.A. et al. An electrostatic deflection system. Instrum Exp Tech 50, 708–711 (2007). https://doi.org/10.1134/S0020441207050119

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  • DOI: https://doi.org/10.1134/S0020441207050119

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