Abstract
The methods of infrared spectroscopy, electron spin resonance, and photoluminescence were used to study the porous-silicon layers formed by electrochemical treatment of Si in an HF: D2O solution. In contrast with the samples prepared in a conventional electrolyte (HF: H2O), a steady increase in the photoluminescence intensity in the course of routine oxidation of the sample was observed, with the hydrogen coverage of the silicon-skeleton surface retained. A mechanism for anomalous oxidation of the layers of porous silicon obtained in a mixture of HF and heavy water is suggested.
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Translated from Fizika i Tekhnika Poluprovodnikov, Vol. 34, No. 6, 2000, pp. 753–756.
Original Russian Text Copyright © 2000 by Kamenev, Konstantinova, Kashkarov, Timoshenko.
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Kamenev, B.V., Konstantinova, E.A., Kashkarov, P.K. et al. Modification of optoelectronic properties of porous silicon produced in an electrolyte based on heavy water. Semiconductors 34, 728–731 (2000). https://doi.org/10.1134/1.1188062
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DOI: https://doi.org/10.1134/1.1188062