Abstract
It is shown in this paper that thin (200–250 Å) hydrogenated nanocrystalline silicon films have low longitudinal conductivity, comparable to that of undoped amorphous silicon, and high transverse conductivity. These films can be used as doping layers in barrier structures with low surface current leakage. It was found that film conductivity decreases by 8–10 orders of magnitude along the layer as the layer thickness is reduced from 1500 to 200 Å. The observed dependence of the conductivity on thickness can be explained (in terms of percolation theory) by destruction of a percolation cluster made up of nanocrystallites as the layer thickness is decreased.
Similar content being viewed by others
References
Amorphous Semiconductors and Devices Based on Them, edited by I. Khamakavi [Metallurgiya, Moscow, 1986].
N. I. Ivanova, N. A. Feoktistov, A. N. Chaika, A. P. Onokhov, and A. B. Pevtsov, Mol. Cryst. Liq. Cryst. 282, 315 (1996).
G. Y. Hu, R. F. O’Connel, Y. L. He, and M. B. Yu, J. Appl. Phys. 78, 3945 (1995).
T. Hamasaki, H. Kurata, M. Hirose, and Y. Osaka, Appl. Phys. Lett. 37, 1084 (1980).
X. Liu, S. Tong, L. Wang, G. Chen, and X. Bao, J. Appl. Phys. 78, 6143 (1995).
A. B. Pevtsov, V. Yu. Davydov, N. A. Feoktistov, and V. G. Karpov, Phys. Rev. B 52, 955 (1995).
V. G. Golubev, V. Yu. Davydov, A. V. Medvedev, A. B. Pevtsov, and N. A. Feoktistov, Fiz. Tverd. Tela (St. Petersburg) 39, 1348 (1997) [Phys. Solid State 39, 1197 (1997)].
R. Tsu, J. Gonsalez-Hernandez, S. S. Chao, S. C. Lee, and K. Tanaka, Appl. Phys. Lett. 40, 534 (1982).
J. M. Ziman, Models of Disorder: The Theoretical Physics of Homogeneously Disordered Systems (Cambridge Univ. Press, Cambridge, 1979; Mir, Moscow, 1982).
V. I. Shklovskii and A. L. Efros, Electronic Properties of Doped Semiconductors (Nauka, Moscow, 1979), Ch. 9, p. 276 (Springer-Verlag, New York, 1984).
Author information
Authors and Affiliations
Additional information
Fiz. Tekh. Poluprovodn. 33, 75–78 (January 1999)
Rights and permissions
About this article
Cite this article
Golubev, V.G., Morozova, L.E., Pevtsov, A.B. et al. Conductivity of thin nanocrystalline silicon films. Semiconductors 33, 66–68 (1999). https://doi.org/10.1134/1.1187635
Received:
Accepted:
Issue Date:
DOI: https://doi.org/10.1134/1.1187635