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Sensitivity of Homogeneity Mapping of Dielectric Wafer Using Millimeter Waves

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Abstract

A plane electromagnetic wave normally falling on a surface of a dielectric plate has been considered to investigate the sensitivity of the dielectric constant homogeneity mapping in the dielectric wafer by measuring the phase and/or the amplitude of the millimeter wave reflected from or transmitted through it. Measurement conditions at which the highest sensitivity might be achieved are established. The sensitivity at Fabry-Perot resonance conditions as well as at frequency shifted from resonance has been considered.

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References

  1. B. T. Rosner, D. W. Weide, High-frequency near-field microscopy, Rev. Sci. Instrum., Vol. 73, No 7, pp. 2505-2525, 2002.

    Article  Google Scholar 

  2. M Golosovsky, and D. Davidov, Novel millimeter-wave near-field resistivity microscope, Appl. Phys. Lett., Vol. 68, No 11, pp. 1579-1581, 1996.

    Article  Google Scholar 

  3. J. Bae, T. Okomoto, T. Fujii, K. Mizuno, and T. Nozokido, Experimental demonstration for scanning near-field optical microscopy using a metal micro-slit probe at millimeter wavelength, Appl. Phys. Lett., Vol. 71, No 24, pp. 3581-3583, 1997.

    Article  Google Scholar 

  4. A. F. Lann, M. Golosovsky, D. Davidov, and A. Frenkel, Combined millimetre-wave near-field microscope and capacitance distance control for the quantitative mapping of sheet resistance of conducting layers, Appl. Phys. Lett., Vol. 73, No. 19, pp. 2832-2834, 1998.

    Article  Google Scholar 

  5. A. F. Lann, M. Abu-Teir, M. Golosovsky, D. Davidov, S. Djordjevic, N. Bontemps, and L. F. Cohen, A Cryogenic microwave scanning near-field probe: Application to study of high-Tc superconductors, Rev. Sci. Instrum., Vol. 70, No 11, pp. 4348-4355, 1999.

    Article  Google Scholar 

  6. A. F. Lann, M. Abu-Teir, M. Golosovsky, D. Davidov, A. Goldgirsch, and V. Beilin, Magnetic field-modulated microwave reflectivity of high-Tc superconductors studied by near-field mm-wave microscopy, Appl. Phys. Lett., Vol. 75, No. 12, pp. 1766-1768, 1999.

    Article  Google Scholar 

  7. A. Laurinavičius, T. Anbinderis, O. Martianova, J. Prišutov, A. Abrutis, and Teišerskis, Nondestructive material homogeneity characterization by millimeter waves, Int. J. Infrared Millimeter Waves, Vol. 22, No. 7, pp. 961-964, 2001.

    Article  Google Scholar 

  8. M. Born, E. Wolf, Principles of optics, Pergamon Press, 1966.

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Authors and Affiliations

  1. Semiconductor Physics Institute, A. Goštauto 11, 01108, Vilnius, Lithuania. E-mail

    Ž. Kancleris & A. Laurinavičius

  2. Joint Stock Company “Elmika”, Naugarduko 41, 03227, Vilnius, Lithuania. E-mail

    T. Anbinderis

Authors
  1. Ž. Kancleris
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  2. A. Laurinavičius
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  3. T. Anbinderis
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Kancleris, Ž., Laurinavičius, A. & Anbinderis, T. Sensitivity of Homogeneity Mapping of Dielectric Wafer Using Millimeter Waves. International Journal of Infrared and Millimeter Waves 25, 1099–1108 (2004). https://doi.org/10.1023/B:IJIM.0000037658.48407.23

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  • DOI: https://doi.org/10.1023/B:IJIM.0000037658.48407.23

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