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A System for the Automation of a Cryogenic Spectral Ellipsometer

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Abstract

A system for automating ellipsometric measurements on the basis of a cryogenic spectral null-ellipsometer is described. Three step motors imitating a manual method are used as actuators. A digital voltmeter serves as a measuring device. The system operates under the control of a computer and contains a minimal number of nonstandard parts. The accuracy characteristics of the ellipsometer are improved due to algorithmic methods: an adaptive method used to seek zero makes it possible to eliminate fluctuation errors by time averaging. The automation system described is a fairly universal means of communication between a computer and an experimental setup and can be applied in other physical experiments.

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Authors and Affiliations

  1. National Technical University Kharkov Polytechnical Institute, ul. Frunze 21, Kharkov, 61002, Ukraine

    A. A. Galuza, A. D. Kudlenko, K. A. Slatin, A. I. Belyaeva & M. M. Smirnov

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  1. A. A. Galuza
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  2. A. D. Kudlenko
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  3. K. A. Slatin
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  4. A. I. Belyaeva
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  5. M. M. Smirnov
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Galuza, A.A., Kudlenko, A.D., Slatin, K.A. et al. A System for the Automation of a Cryogenic Spectral Ellipsometer. Instruments and Experimental Techniques 46, 477–479 (2003). https://doi.org/10.1023/A:1025121813267

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  • DOI: https://doi.org/10.1023/A:1025121813267

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