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A Power Meter for a Radio Frequency Cathode Sputtering Installation

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Abstract

A meter of the radio frequency power deposited in a gas discharge of a magnetron sputtering system of an installation for depositing thin films is described. The device is based on a KP525ПС2А integral analog multiplier. The power measurement range is 10–1000 W, the operating frequency is 13.56 MHz, and the measurement error is within ±3%.

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REFERENCES

  1. Potapenko, I.P., Prib. Tekh. Eksp., 1993, no. 5, p. 192.

  2. Belyanin, A.F., Pashchenko, P.V., and Semenov, A.P., Prib. Tekh. Eksp., 1991, no. 3, p. 220.

  3. Danilin, B.S. and Logunov, V.I., Elektron. Tekh., Ser. 3: Mikroelektronika, 1973, issue 3(43), p. 84.

  4. Danilin, B.S. and Logunov, V.I., Elektron. Tekh., Ser. 3: Mikroelektronika, 1972, issue 2, p. 26.

  5. Danilin, B.S., Kachurin, Yu.E., and Logunov, V.I., Elektron. Tekh., Ser. 3: Mikroelektronika, 1973, issue 1, p. 82.

  6. Gutnikov, V.S., Integral'naya elektronika v izmeritel'nykh ustroistvakh (Integrated Circuits in Measuring Devices), Leningrad: Energoatomizdat, 1988, p. 132.

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Authors and Affiliations

  1. National Academy of Sciences of Ukraine, Institute of Applied Physics, ul. Petropavlovskaya 58, Sumy, 40038, Ukraine

    A. G. Nagornyi & S. V. Kolinko

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  1. A. G. Nagornyi
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  2. S. V. Kolinko
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Nagornyi, A.G., Kolinko, S.V. A Power Meter for a Radio Frequency Cathode Sputtering Installation. Instruments and Experimental Techniques 46, 131–134 (2003). https://doi.org/10.1023/A:1022576400095

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  • DOI: https://doi.org/10.1023/A:1022576400095

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