Abstract
Amorphous ultrafine tin-containing organic thin films have been prepared by means of radio frequency (RF) glow-discharge plasma polymerization of tetrabutyltin (TBT). After being annealed, the films turned into ultrafine SnOx thin films, which possessed high gas sensitivity. The influences of the thermal annealing process on the film's composition, microstructure, and gas sensitivity to such reductive gases as EtOH, H 2 , CH 4 , and CO were investigated, and the effects of doping silver into the film on its gas sensitivity were also discussed in detail. By doping with Ag, the sensitivity and selectivity of the film obviously increased, the optimum operating temperature decreased, and the film color apparently changed. Based on these facts, the catalysis mechanism of doped Ag is addressed.
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Zhang, Y., Zhou, K., Cao, W. et al. SnOx Thin Film Gas Sensors Prepared by Plasma Deposition from Tetrabutyltin. Plasma Chemistry and Plasma Processing 19, 299–310 (1999). https://doi.org/10.1023/A:1021651911017
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DOI: https://doi.org/10.1023/A:1021651911017