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Material Optimization of the Novel Cantilever Based RF MEMS Switch for Mobile Communication

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Abstract

In this paper, the cantilever based novel RF MEMS switch structure was designed and its dimensions were optimized through parametric analysis to reduce the pull in voltage and to increase the performance of the RF MEMS series switch at Ka-Band frequency. The selection of appropriate materials for the device is also done through the electromechanical parametric analysis. To improve the performance of the RF MEMS switch, the dimensions are optimized, and loss are reduced. To extract the optimized dimensions the switch has undergone electromechanical analysis such as pull in voltage, capacitance, switching time, stress analysis and RF performance. The reduction of pull-in voltage of the device such that it is capable of working in satellite and mobile communication applications is performed and analysed. Various Finite element model tools such as Comsol 5.2 is used for the analysis of the designed structure for analysing the electromechanical, capacitive, RF performance and other parameters of the device. Ansys HFSS simulator tool is used for analysing the losses of the device and determining the frequency range at which the device have better performance.

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Acknowledgements

The authors would like to thank NPMASS for providing the necessary FEM tools for design and simulations under NMDC.

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  1. Department of E.C.E, Koneru Lakshmaiah Education Foundation, Vaddeswaram, AP, India

    N. Siddaiah & T. Vamsi Aravind Swamy

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  1. N. Siddaiah
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  2. T. Vamsi Aravind Swamy
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Correspondence to N. Siddaiah.

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Siddaiah, N., Vamsi Aravind Swamy, T. Material Optimization of the Novel Cantilever Based RF MEMS Switch for Mobile Communication. Trans. Electr. Electron. Mater. 20, 350–358 (2019). https://doi.org/10.1007/s42341-019-00120-y

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