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Modeling and Simulation of Cantilever Based RF MEMS Switch

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Soft Computing Systems (ICSCS 2018)

Part of the book series: Communications in Computer and Information Science ((CCIS,volume 837))

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Abstract

In this paper, Cantilever based RF MEMS switches are designed and simulated for applications in reconfigurable antennas. Due to the low cost and ease of fabrication Cantilever based RF MEMS switch is preferred. The CoventorWare software (FEM) is used for the simulation of the proposed RF MEMS switch. The pull in voltage is calculated using the formulas and analyzed using MATLAB. Based on the analysis of the dependence of these parameters on the geometry of the cantilever, it is designed and simulated using CoventorWare software. Using this software the optimization of the design of the cantilever switch is performed for minimum pull in voltage. The pull in voltage for the proposed design is obtained as 34 V.

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References

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Acknowledgement

The authors would like to gratefully acknowledge the Electronic Science Department, Savitribai Phule Pune University, Pune for providing the software tool CoventorWare software required for simulation and evaluation for the switch design.

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Correspondence to Raji George .

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© 2018 Springer Nature Singapore Pte Ltd.

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George, R., Kumar, C.R.S., Gangal, S.A. (2018). Modeling and Simulation of Cantilever Based RF MEMS Switch. In: Zelinka, I., Senkerik, R., Panda, G., Lekshmi Kanthan, P. (eds) Soft Computing Systems. ICSCS 2018. Communications in Computer and Information Science, vol 837. Springer, Singapore. https://doi.org/10.1007/978-981-13-1936-5_82

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  • DOI: https://doi.org/10.1007/978-981-13-1936-5_82

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  • Publisher Name: Springer, Singapore

  • Print ISBN: 978-981-13-1935-8

  • Online ISBN: 978-981-13-1936-5

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