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Enhancement of Mechanical and Thermal Properties of SU-8 Photoresist with Multilayer Woven Glass Fabric Based on Micromachining Technology

  • Original Article - Theory, Characterization and Modeling
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Abstract

SU-8 photoresist has been more and more widely used as a structural material in micro electromechanical system (MEMS) because of its low cost and excellent biocompatibility. However, the inferior mechanical and thermal performances immensely impinge the reliability of the MEMS device based SU-8 and accordingly restrict its application. Here we report the mechanical and thermal performance of SU-8 reinforced by the multilayer glass fabric with the MEMS technology. The finite element simulation and specific experiment are conducted, which confirm that the reinforced SU-8 composites have a 281% increase in Young's modulus and a 64% decrease in coefficient of thermal expansion (CTE) compared with pure SU-8. Additionally, the improved mechanism has also been analyzed, including the excellent interface bonding between the SU-8 and glass fabric, and the high-bond energy of Si–O-Si chain structures in glass fabric. Furthermore, the glass fabric reinforced SU-8 could still possess a high light transmittance to maintain the ability of lithography patterning. Therefore, it is believed that the strategy proposed here may satisfy higher requirements of MEMS devices, which guarantees its practical applications in the functional microstructures.

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Acknowledgements

This work is supported by the technology development fund of Shanghai Science and Technology Commission (No. 17DZ2291400), and Shanghai Professional Technical Service Platform for Non-Silicon Micro-Nano Integrated Manufacturing.

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Authors and Affiliations

  1. National Key Laboratory of Science and Technology On Micro/Nano Fabrication, Shanghai Jiao Tong University, Shanghai, 200240, China

    Wenwen Zhou, Yahui Li, Yunna Sun, Jinyuan Yao, Xutong Song & Guifu Ding

  2. Department of Micro/Nano Electronics, School of Electronic Information and Electrical Engineering, Shanghai Jiao Tong University, Shanghai, 200240, China

    Wenwen Zhou, Yahui Li & Xutong Song

Authors
  1. Wenwen Zhou
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  2. Yahui Li
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  3. Yunna Sun
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  4. Jinyuan Yao
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  6. Guifu Ding
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Correspondence to Guifu Ding.

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Zhou, W., Li, Y., Sun, Y. et al. Enhancement of Mechanical and Thermal Properties of SU-8 Photoresist with Multilayer Woven Glass Fabric Based on Micromachining Technology. Electron. Mater. Lett. 16, 604–614 (2020). https://doi.org/10.1007/s13391-020-00247-8

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  • DOI: https://doi.org/10.1007/s13391-020-00247-8

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