Skip to main content

Advertisement

Log in

Modeling and realization of work-space analysis of a piezoelectric actuator 2-DOF vibration-assisted swing cutting system

  • Original Article
  • Published:
Applied Nanoscience Aims and scope Submit manuscript

Abstract

This paper presents some results achieved in the ultra-precision manufacturing, microelectronics engineering, as well as bioengineering applications of vibration-assisted swing cutting (VASC) technology, and describes the resolved and unresolved challenges presented by VASC manufacturing. In particular, it outlines the residual-height between adjacent trajectories in EVC process technology cannot be eliminated, which has the effect of alleviating this problem. Based on matrix-based compliance modeling, the stroke of the PZTs and the allowable stress of the material on the work-space were analyzed. Theoretical modeling was validated by finite element analysis (FEA). The results showed that the max-stroke of the PZTs and the Von Mises stress could reach up to 16.67 μm and 196.6 MPa in the theoretical, respectively. The max-stroke of the PZTs and the Von Mises stress could reach up to 19.50 μm and 158.9 MPa in the finite element analysis, respectively. Cutting experiment was carried out on the basis of VASC design and modeling, which further verified the large work-space and the VASC technology can suppress residual-height between adjacent trajectories effectively. Thus, the superior performances and easily achievable high surface machining accuracy well facilitate practical applications of the VASC system in micro-/nano machining.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6

Similar content being viewed by others

References

  • Ahn JH, Lim HS, Son SM (1999) Improvement of micro-machining accuracy by 2-dimensional vibration cutting. Proc ASPE 20:150–153

    Google Scholar 

  • Bo W, Zhenyu Z, Keke C, Junfeng C, Andreas R, Jinhong Y et al (2018) New deformation-induced nanostructure in silicon. Nano Lett 18:4611

    Article  Google Scholar 

  • Bruzzone AAG, Costa HL, Lonardo PM, Lucca DA (2008) Advances in engineered surfaces for functional performance. CIRP Ann Manuf Tech 57(2):750–769

    Article  Google Scholar 

  • Fan QW, Wang P, Zhang HQ, Gao XJ (2010) Analysis of running mechanism of crossover operators in genetic algorithm. J Beijing Univ Technol 36(10):1328–1336

    Google Scholar 

  • Huang H, Li B, Deng Z, Hu Y (2012) A 6-DOF adaptive parallel manipulator with large tilting capacity. Robot Comput Integr Manuf 28(2):275–283

    Article  Google Scholar 

  • Junfeng H, Xingxing Z, Shuai Y, Yifei L (2018) Design of a new type of large working space and decoupled micro-operation platform. Mech Des 35(09):79–85 (in chinese)

    Google Scholar 

  • Kind H, Bonard JM, Emmenegger C, Nilsson LO, Hernadi K, Maillardschaller E et al (1999) Patterned films of nanotubes using microcontact printing of catalysts. Adv Mater 11(15):1285–1289

    Article  CAS  Google Scholar 

  • Kolar JW, Round SD (2006) Analytical calculation of the RMS current stress on the DC-link capacitor of voltage-PWM converter systems. IEE Proc IET Electr Power Appl 153(4):535

    Article  Google Scholar 

  • Lin J, Zhao D, Lu M, Yi A (2018) Modeling and analysis of a novel decoupled vibration-assisted swing cutting system for micro/nano-machining surface. IEEE Access 6:70388–70396

    Article  Google Scholar 

  • Lu M, Hao W, Liang G, Lin J, Yan G, Chen B et al (2018a) Modeling and analysis of surface topography of Ti6Al4V alloy machining by elliptical vibration cutting. Int J Adv Manuf Technol 98(9–12):2759–2768

    Article  Google Scholar 

  • Lu M, Zhao D, Lin J, Zhou X, Zhou J, Chen B et al (2018b) Design and analysis of a novel piezoelectrically actuated vibration assisted rotation cutting system. Smart Mater Struct 27(9):095020

    Article  Google Scholar 

  • Neinhuis C, Barthlott W (1997) Characterization and distribution of water-repellent, self-cleaning plant surfaces. Ann Bot 79(6):677

    Article  Google Scholar 

  • Riedl A, Daniel R, Stefenelli M, SchBerl T, Kolednik O, Mitterer C et al (2012) A novel approach for determining fracture toughness of hard coatings on the micrometer scale. Scr Mater 67(7–8):708–711

    Article  CAS  Google Scholar 

  • Song G, Zhao J, Zhou X, Abreu-Garcia JAD (2005) Tracking control of a piezoceramic actuator with hysteresis compensation using inverse Preisach model. IEEE ASME Trans Mechatron 10(2):198–209

    Article  Google Scholar 

  • Suzuki H, Moriwaki T, Okino T, Ando Y (2006) Development of ultrasonic vibration assisted polishing machine for micro aspheric die and mold. CIRP Ann Manuf Technol 55(1):385–388

    Article  Google Scholar 

  • Xiao S, Li Y (2013) Development of a large working range flexure-based 3-DOF micro-parallel manipulator driven by electromagnetic actuators. In: 2013 IEEE international conference on robotics and automation, pp 4506–4511

  • Yan J, Zhang Z, Kuriyagawa T (2010) Tool wear control in diamond turning of high-strength mold materials by means of tool swinging. CIRP Ann Manuf Technol 59(1):109–112

    Article  Google Scholar 

  • Zhang Z, Huo F, Zhang X, Guo D (2012a) Fabrication and size prediction of crystalline nanoparticles of silicon induced by nanogrinding with ultrafine diamond grits. Scr Mater 67(7–8):657–660

    Article  CAS  Google Scholar 

  • Zhang Z, Song Y, Huo F, Guo D (2012b) Nanoscale material removal mechanism of soft-brittle HgCdTe single crystals under nanogrinding by ultrafine diamond grits. Tribol Lett 46(1):95–100

    Article  Google Scholar 

  • Zhang ZY, Huo YX, Guo DM (2013) A model for nanogrinding based on direct evidence of ground chips of silicon wafers. Sci China Technol Sci 56(9):2099–2108

    Article  CAS  Google Scholar 

  • Zhang SJ, To S, Zhang GQ, Zhu ZW (2015a) A review of machine-tool vibration and its influence upon surface generation in ultra-precision machining. Int J Mach Tools Manuf 91:34–42

    Article  Google Scholar 

  • Zhang Z, Bo W, Kang R, Bi Z, Guo D (2015b) Changes in surface layer of silicon wafers from diamond scratching. CIRP Ann Manuf Technol 64(1):349–352

    Article  Google Scholar 

  • Zhang Z, Huang S, Wang S, Wang B, Bai Q, Zhang B, Guo D (2017) A novel approach of high-performance grinding using developed diamond wheels. Int J Adv Manuf Technol 91(9–12):3315–3326

    Article  Google Scholar 

  • Zhu ZW, Zhou XQ, Wang RQ, Liu Q (2015) A simple compliance modeling method for flexure hinges. Sci China Technol Sci 58(1):56–63

    Article  Google Scholar 

Download references

Acknowledgements

This research was financially supported by the Ministry of Science and Technology State Key Support Program (2016YFE0105100), MicroNano and Ultra-Precision Key Laboratory of Jilin Province (20140622008JC) and Science and Technology Development Projects of Jilin Province (20180101034JC, 20180201052GX, 20190201303JC), Education Department Scientific Research Planning Project of Jilin Provincial (JJKH20181038KJ).

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Jieqiong Lin.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Lu, M., Chen, J., Zhao, D. et al. Modeling and realization of work-space analysis of a piezoelectric actuator 2-DOF vibration-assisted swing cutting system. Appl Nanosci 11, 777–785 (2021). https://doi.org/10.1007/s13204-019-01079-1

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s13204-019-01079-1

Keywords

Navigation