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Preparation and high-frequency soft magnetic property of FeCo-based thin films

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Abstract

A series of FeCo-based thin films were prepared by magnetron sputtering without applying an induced magnetic field. The microstructure, electrical properties, magnetic properties and thermal stability of FeCo, FeCoSiN monolayer thin film and [FeCoSiN/SiN x ] n multilayer thin film were investigated systematically. When FeCo thin film was doped with Si and N, the resistivity and soft magnetic properties of the obtained FeCoSiN thin film can be improved effectively. The coercivity (H c), resistivity (ρ) and ferromagnetic resonance frequency (f r) can be further optimized for the [FeCoSiN/SiN x ] n multilayer thin film. When the thickness of FeCoSiN layer and SiN x layer is maintained at 7 and 2 nm, the H c, ρ and f r for [FeCoSiN/SiN x ] n multilayer thin film are 225 A·m−1 392 µΩ·cm−1 and 4.29 GHz, respectively. In addition, the low coercivity of easy axis (H ce ≈ 506 A·m−1) of [FeCoSiN/SiN x ] n multilayer thin film can be maintained after annealing at 300 °C in air for 2 h.

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Acknowledgments

This study was financially supported by the National Basic Research Program of China (No. 2012CB933103), the National Natural Science Foundation of China (Nos. 51171158, 51371154 and 51301145), and the Natural Science Foundation of Fujian Province of China (No. 2014J05009).

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  1. Fujian Key Laboratory of Advanced Materials, College of Materials, Xiamen University, Xiamen, 361005, China

    Xiao-Long Liu, Lai-Sen Wang, Qin Luo, Lei Xu, Bei-Bei Yuan & Dong-Liang Peng

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  1. Xiao-Long Liu
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  2. Lai-Sen Wang
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  3. Qin Luo
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  4. Lei Xu
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Correspondence to Lai-Sen Wang.

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Liu, XL., Wang, LS., Luo, Q. et al. Preparation and high-frequency soft magnetic property of FeCo-based thin films. Rare Met. 35, 742–746 (2016). https://doi.org/10.1007/s12598-015-0574-6

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  • DOI: https://doi.org/10.1007/s12598-015-0574-6

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