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Structural and Mechanical Characterization of Platinum Thin Films Prepared Electrochemically on ITO/Glass Substrate

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Abstract

We report the structural characterization and nanomechanical properties of platinum (Pt) thin films prepared through facile electrochemical synthesis. The Pt thin films were coated onto indium tin oxide (ITO)/glass substrates by two-electrode electrochemical deposition at room temperature. They were characterized using X-ray diffraction, scanning electron microscopy, and atomic force microscopy for structural and morphological analyses. Indentation depth-dependent hardness and elastic modulus of the prepared films were analyzed using the nanoindentation technique. Furthermore, the mechanical properties of the ITO/glass substrates were also investigated to understand the influence of the substrate on the film properties. The prepared films showed reasonable mechanical and structural properties suitable for device applications. Finally, the photoconductivity effect of the prepared Pt film was also studied to determine its suitability for device applications. The Pt film was also coated on Cu plates to check substrates effects on this electrochemical deposition, and found that the Cu plates produced well adherent smooth films.

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Acknowledgements

This work was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF-2017R1A2B3009706 & NRF- 2017R1D1A1A09000823) and the research program of Dongguk University in 2019 (S-2019-G0001-00018).

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Authors and Affiliations

  1. Millimeter-wave Innovation Technology Research Center, Dongguk University, Seoul, 04620, Republic of Korea

    A. Kathalingam

  2. Department of Mechanical Engineering, Sogang University, Seoul, 04107, Republic of Korea

    Karuppasamy Pandian Marimuthu & Hyungyil Lee

  3. Division of Electronics and Electrical Engineering, Dongguk University, Seoul, 04620, Republic of Korea

    K. Karuppasamy, Hyun-Chang Park & Hyun-Seok Kim

  4. Department of Computer Electronics Engineering, Seoil University, Seoul, 02192, Republic of Korea

    Yeon-Sik Chae

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  1. A. Kathalingam
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Correspondence to Hyun-Seok Kim.

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Kathalingam, A., Marimuthu, K.P., Karuppasamy, K. et al. Structural and Mechanical Characterization of Platinum Thin Films Prepared Electrochemically on ITO/Glass Substrate. Met. Mater. Int. 27, 1554–1564 (2021). https://doi.org/10.1007/s12540-019-00527-5

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