Abstract
We proposed a called “nano-fabrication based on MEMS technology” approach to realize the typical nano-electromechanical structures, such as integrated nano probe, ultrathin cantilever, silicon nano wire, and doubly clamped nano beam, to demonstrate the feasibility and advantages. We also introduced the characterization of nano structures based on laser vibrometer and piezoresistive effect, the latter method was first time applied to investigate a doubly daped nanobeam with a thickness of about 200 nm.
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References
A. N. Cleland and M. L. Roukes, Appl. Phys. Lett., 69 (1996), 2653.
Nakajima, A., Futatsugi, T., Kosemura, K., Fukano, T., and Yokoyama, N., Appl. Phys. Lett., 70 (1997), 1742.
S. Zankovych, T. Hoffmann, J. Steekamp, J.-U. Bruch, and C.M. Sotomayor Torres, Nanotechnol., 12 (2001), 91.
S. Reyntjens and R. Puers, J. Micromech. Microeng., 11 (2001), 287.
N. Oyabu, O. Custance, I. Yi, Y. Sugawara, and S. Morita, Phys. Rev. Lett., 90 (2003), 176.
J. Drucker, IEEE J. Quantum Electron., 38, (2002), 975.
Y. Wang, X. Li, T. Li, H. Yang, and J. Jiao IEEE Sensor Journal, 6 (2006) 686.
Z. X. Yang, et al., Microelectron. J., 35 (2004), 479.
X. X. Li, Appl. Phys. Lett., 83 (2003), 3081.
Liu W., Chinese J. of Semiconductors, 27 (2006), 1645.
D. Dutta and D.T. Leighton Jr, Microfluid Nanofluid, 2 (2006), 275.
A. N. Cleland and M. L. Roukes, Appl. Phys. Lett. 69 (1996), 2653.
Dustin W. Carr, S. Evoy, L. Sekaric, H.G, Craighead, and J.M. Parpia, Appl. Phys. Lett., 75 (1999), 920.
J. Yang, T. Ono, and M. Esashi, Sens. Actuators A 82 (2000), 102.
M. Bao, in Micro Mechanical Transducers—Pressure Sensors, Accelerometers and Gyroscopes, edited by S. Middelhoek (ELSEVIER, New York), Chap. 2 (2000).
J. Q. Broughton, C. A. Meli, P. Vashishta, and K. Kalia, Phys. Rev. B 56 (1997), 611.
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Antrag GZ 398, Ghinesisch-Deutsches Zentrum für Wissenschaftsförderung.
This work was supported by the Major State Basic Research Program of China “Micro-tonano scale fabrication based on top-down principle” (Project 2006CB300403).
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Jiao, Jw., Yang, H., Li, T. et al. Fabrication and characterization of NEMS. Optoelectron. Lett. 3, 91–94 (2007). https://doi.org/10.1007/s11801-007-7015-1
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DOI: https://doi.org/10.1007/s11801-007-7015-1