Abstract
In this paper, we examine, both experimentally and theoretically, the kinetics of formation and microstructure of product phases in thin film reactions, using the Nb/Al and Ti/Al systems as our prototypes. The results of calorimetry and microscopy studies are interpreted using simple kinetic and morphology models. In particular, the kinetic models employed here focus on the nucleation and growth components of the phase formation process and the morphology models provide a starting point for the classification of product grain structures.
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An erratum to this article is available at http://dx.doi.org/10.1007/s11664-997-0087-7.
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Barmak, K., Rickman, J.M. & Michaelsen, C. Evolution of grain structure in thin film reactions. J. Electron. Mater. 26, 1009–1020 (1997). https://doi.org/10.1007/s11664-997-0238-x
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DOI: https://doi.org/10.1007/s11664-997-0238-x