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Low-Temperature Sintering Properties of Bi2O3 Doped PZT-5H Piezoelectric Ceramics

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Abstract

Due to its excellent piezoelectric characteristics and Curie temperatures, PZT-5H piezoelectric ceramics are perfect for creating low-temperature co-fired multilayer devices. The effects of Bi2O3 doping on the low-temperature sintering properties of PZT-5H ceramic powder were investigated in this work. When the mass fraction of Bi2O3 is 0.9%, PZT-5H ceramics can be completely sintered at 850°C. In addition, the chemical composition exhibits the best electrical properties at this doping level and lies at the morphological phase boundary (MPB). The property is as follows: d33 = 504pC/N, tan δ = 0.0296, kp = 0.653, Qm = 30.983, and Tc = 230°C. A multilayer piezoelectric ceramic actuator was created in this work to better demonstrate the real-world applications of using this material in low-temperature co-fired devices. The multilayer piezoelectric actuator’s characterization revealed that the material was tightly attached to the Ag electrode, and that there was minimal Ag diffusion at the bond, with satisfactory co-firing matching. At a drive voltage of 600 V, the multilayer actuator produced a displacement of 2.18 μm and a strain value of 0.109%. This showed that it was feasible to create multilayer piezoelectric ceramic actuators with this material, and that it provides a new alternative material for creating other multilayer piezoelectric ceramic devices.

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Acknowledgments

This work was supported by the National Natural Science Foundation of China (Grant Nos. U1806221, 51672198, 51572204 and 51072146), Innovation and Development Project of Zibo City (2017CX01A022), Instruction & Development Project for National Funding Innovation Demonstration Zone of Shandong Province (2018ZCQZB01, 2019ZCQZB03), Central Guiding Local Science and Technology Development Special Funds (Grant Nos. 2060503), and Key Research & Design Program of Shandong Province (2019GGX102011).

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Authors and Affiliations

  1. School of Materials Science and Engineering, Wuhan University of Technology, Wuhan, 430070, People’s Republic of China

    Wanzi Mao, Qing Xu, Duanping Huang, Huajun Sun, Feng Zhang & Xiaobin Xie

  2. Advanced Ceramics Institute of Zibo New & High-Tech Industrial Development Zone, Zibo, 255000, People’s Republic of China

    Wanzi Mao, Duanping Huang & Huajun Sun

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  1. Wanzi Mao
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Correspondence to Duanping Huang.

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Mao, W., Xu, Q., Huang, D. et al. Low-Temperature Sintering Properties of Bi2O3 Doped PZT-5H Piezoelectric Ceramics. J. Electron. Mater. 52, 3334–3342 (2023). https://doi.org/10.1007/s11664-023-10312-1

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