In order to improve the power durability of Al electrode films and obtain fine-dimensional control in high-frequency surface acoustic wave (SAW) devices, two-layered Al-Zr/Ti electrode films were investigated on 128°Y−X LiNbO3 substrates by sputter deposition. The results indicated that Al-Zr/Ti electrode films had improved electromigration (EM) reliability compared to Al/Ti electrode films and their lifetime was strongly dependent on the microstructure and Zr concentration. Al-Zr/Ti electrode films with a strong Al (111) texture exhibited longer EM lifetime than polycrystalline films. The Al-Zr/Ti electrode film with an ideal Zr concentration of 0.2 wt.% and a sputtering pressure of 0.25 Pa had a strong Al (111) texture, and its lifetime was approximately four times longer than that of Al/Ti films tested at a current density of 5 × 107 A/cm2 at 200°C. Furthermore, the Al-Zr/Ti films were easily etched in reactive ion etching and fine-dimensional control was realized during pattern replication for high-frequency SAW devices.
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Li, D., Li, Q. & Pan, F. Improvement in Power Durability of Al Electrode Films Used in SAW Devices by Zr Additive and Ti Underlayer. J. Electron. Mater. 37, 180–184 (2008). https://doi.org/10.1007/s11664-007-0291-5
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DOI: https://doi.org/10.1007/s11664-007-0291-5