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Transmission electron microscope specimen preparation of Zn powders using the focused ion beam lift-out technique

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Abstract

Particles of Zn powder have been studied to show that high-quality scanning electron microscope (SEM) and transmission electron microscope (TEM) specimens can be rapidly produced from a site-specific region on a chosen particle by the focused ion beam (FIB) lift-out technique. A TEM specimen approximately 20-µm long by 5-µm wide was milled to electron transparency, extracted from the bulk particle, and micromanipulated onto a carbon coated copper mesh TEM grid. Using the FIB lift-out method, we were able to prepare a site-specific TEM specimen from a difficult material in under 3 hours. The TEM analysis of the lift-out specimen revealed a large amount of thin area free from characteristic signs of damage that may be observed as a result of conventional argon ion milling. The overall microstructure of the specimen prepared by the FIB lift-out method was consistent with samples prepared by conventional metallographic methods. A grain size of ∼10 to 20 µm was observed in all specimens by both TEM and SEM analysis. Light optical microscopy revealed the presence of internal voids in ∼10 to 20 pct of all particles. The SEM analysis showed the voids to extend over ∼70 pct of the particle volume in some cases.

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Author notes

  1. T. L. Shofner (Senior Technical Associate)

    Present address: Kirk Resources, 32819, Orlando, FL

Authors and Affiliations

  1. the Department of Mechanical, Materials, and Aerospace Engineering, University of Central Florida, 32816-2450, Orlando, FL

    B. I. Prenitzer (Graduate Research Assistant) & L. A. Giannuzzi (Associate Professor)

  2. Process Development, Keystone Powdered Metal Company, 15857, St. Marys, PA

    K. Newman (Manager)

  3. Cirent Semiconductor, 32819, Orlando, FL

    S. R. Brown (Senior Technical Associate), R. B. Irwin (Member of the Technical Staff) & F. A. Stevie (Member of the Technical Staff)

  4. The Bartech Group, 32819, Orlando, FL

    T. L. Shofner (Senior Technical Associate)

Authors
  1. B. I. Prenitzer
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  2. L. A. Giannuzzi
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  3. K. Newman
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  4. S. R. Brown
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  5. R. B. Irwin
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  6. F. A. Stevie
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  7. T. L. Shofner
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Prenitzer, B.I., Giannuzzi, L.A., Newman, K. et al. Transmission electron microscope specimen preparation of Zn powders using the focused ion beam lift-out technique. Metall Mater Trans A 29, 2399–2406 (1998). https://doi.org/10.1007/s11661-998-0116-z

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  • DOI: https://doi.org/10.1007/s11661-998-0116-z

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