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A Comprehensive FIB Lift-out Sample Preparation Method for Scanning Probe Microscopy

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Abstract

In this work, we investigate cross-sectional sample preparation for atomic force microscopy and general scanning probe microscopy (SPM) characterization. In light of traditional cross-sectional sample preparation solutions for transmission electron microscopy, mechanical polishing and focused ion beam (FIB) milling have been employed to prepare cross-sectional samples for SPM. We present an optimized solution for thin films and oxide heterostructures that allows for examining the prepared surfaces using various SPM techniques. In particular, post-cleaning after FIB milling is shown to be crucial and precision ion polishing was conducted to remove rough layers on mechanically polished samples. We also study SPM mechanical milling to remove amorphous layers on FIB-milled samples. Consequently, a reliable solution for making cross sections suitable for SPM has been achieved providing a useful methodology that can also be employed for other material systems with different hardness, such as polymers and metals.

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Acknowledgements

We acknowledge support by the Australian Research Council through Discovery Grants and the ARC Centre of Excellence in Future Low-Energy Electronics Technologies (FLEET). The authors also acknowledge the facilities and the scientific and technical assistance of Microscopy Australia at the Electron Microscope Unit (EMU) within the Mark Wainwright Analytical Centre (MWAC) at UNSW Sydney.

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Authors and Affiliations

  1. School of Materials Science and Engineering, UNSW Sydney, Sydney, NSW, 2052, Australia

    F. Ji, T. Xin & J. Seidel

  2. ARC Centre of Excellence in Future Low-Energy Electronics Technologies (FLEET), UNSW Sydney, Sydney, NSW, 2052, Australia

    F. Ji & J. Seidel

  3. Electron Microscopy Unit (EMU), Mark Wainwright Analytical Centre, UNSW Sydney, Sydney, NSW, 2052, Australia

    Y. Yao

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Ji, F., Yao, Y., Xin, T. et al. A Comprehensive FIB Lift-out Sample Preparation Method for Scanning Probe Microscopy. Nanomanuf Metrol 5, 67–79 (2022). https://doi.org/10.1007/s41871-021-00107-5

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