Abstract
Arrays of vacuum microelectronic sources are fabricated on a glass substrate using cupric oxide (CuO) nanowire emitters. The arrays of electron sources possess a microdiode structure, which can effectively induce field emission and control the delivery of emitted electrons to the anode in a triode-type device operation. A technique for precisely growing CuO nanowires at the centre of microcavities in an array without using a catalyst and at temperatures as low as 400°C is presented. Such a simplified fabrication procedure results in improved field emission performance from the array compared with previous vacuum microelectronic devices. Typical prototype devices have turn-on gate voltages as low as 169 V to give emission current densities of 10 μA/cm2 at the anode. The ratio of anode current to cathode current reaches ∼0.85, and the maximum change in emission current density per volt is 1 μA/cm2. Electron emission from the arrays is stable and reproducible under either pulsed or direct current fields. These characteristics indicate that microgate-controlled CuO nanowire emitters may find application in practical devices.
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Xu N S, Huq S E. Novel cold cathode materials and applications. Mater Sci Eng R, 2005, 48: 47–189
Xu N S, Deng S Z, Chen J. The application of carbon nanotubes in high-efficiency low power consumption field-emission luminescent tube. Ultramicroscopy, 2003, 95: 19–28
Fang X S, Bando Y, Gautam U K, et al. Inorganic semiconductor Nanostructures and Their Field-Emission Application. J Mater Chem, 2008, 18: 509–522
Teo K B K, Minoux E, Hudanski L, et al. Microwave devices: Carbon nanotubes as cold cathodes. Nature, 2005, 437: 968
Huq S E, Kent B J, Stevens R, et al. Field emitters for space application. J Vac Sci Technol B, 2001, 19: 988–991
Cho J B, Lee S, Yoon H J, et al. Fabrication and operation of triode electron emitters as ion source for miniature mass spectrometer. J Vac Sci Technol B, 2008, 26: 689–693
Teo K B K, Chhowalla M, Amaratunga G A J, et al. Fabrication and electrical characteristics of carbon nanotube-based microcathodes for use in a parallel electron-beam lithography system. J Vac Sci Technol B, 2003, 21: 693–697
Choi W B, Chung D S, Kang J H, et al. Fully sealed, high-brightness carbon-nanotube field-emission display. Appl Phys Lett, 1999, 75: 3129–3131
Lee N S, Chung D S, Han I T, et al. Application of carbon nanotubes to field emission displays. Diam Relat Mater, 2001, 10: 265–270
Dijon J, Fournier A, Levis M, et al. 6″ Colour CNT FED demonstrator with high peak brightness. J SID, 2007, 38: 1313–1316
Spindt C A. A thin film field-emission cathode. J Appl Phys, 1968, 39: 3504–3505
Shiratori Y, Hiraoka H, Takeuchi Y, et al. One-step formation of aligned carbon nanotube field emitters at 400°C. Appl Phys Lett, 2003, 82: 2485–2487
She J C, Hao H, Xu N S, et al. Arrays of vacuum microdiodes using uniform diamondlike-carbon tip apexes. Appl Phys Lett, 2006, 89: 233518–233518-3
Guillorn M A, Melechko A V, Merkulov V I, et al. Self-aligned gated field emission devices using single carbon nanofiber cathodes. Appl Phys Lett, 2002, 81: 3660–3662
Choi J O, Akinwande A I, Smith H I. 100 nm gate hole openings for low voltage driving field emission display applications. J Vac Sci Technol B, 2001, 19: 900–903
Choi J H, Park Y J, Lee H W, et al. Process development of gated field emitter arrays with dry etched amorphous sillicon microtips on glass substrates. J Vac Sci Technol B, 2000, 18: 984–988
Wang Q H, Yan M, Chang R P H. Flat panel display prototype using gated carbon nanotube field emitters. Appl Phys Lett, 2001, 78: 1294–1296
Chung D S, Park S H, Lee H W, et al. Carbon nanotube electron emitters with a gated structure using backside exposure processes. Appl Phys Lett, 2002, 80: 4045–4047
Choi W B, Jin Y W, Kim H Y, et al. Electrophoresis deposition of carbon nanotubes for triode-type field emission display. Appl Phys Lett, 2001, 78: 1547–1549
Li S Y, Lee C Y, Lin P, et al. Gate-controlled ZnO nanowires for field-emission device application. J Vac Sci Technol B, 2006, 24: 147–151
Lee Y H, Jang Y T, Kim D H, et al. Realization of gated field emitters for electrophotonic applications using carbon nanotube line emitters directly grown into submicrometer holes. Adv Mater, 2001, 13: 479–482
Gangloff L, Minoux E, Teo K B K, et al. Self-aligned, gated arrays of individual nanotube and nanowire emitters. Nano Lett, 2004, 4: 1575–1579
Lee C Y, Tseng T Y, Li S Y, et al. Electrical characterizations of a controllable field emission triode based on low temperature synthesized ZnO nanowires. Nanotechnology, 2006, 17: 83–88
Guillorn M A, Melechko A V, Merkulov V I, et al. Operation of a gated field emitter using an individual carbon nanofiber cathode. Appl Phys Lett, 2001, 79: 3506–3508
Piro G, Legagneux P, Pribat D, et al. Fabrication and electrical characteristics of carbon nanotube field emission microcathodes with an integrated gate electrode. Nanotechnology, 2002, 13: 1–4
Park K H, Seo W J, Lee S, et al. Triode field emitter with a gated planar carbon-nanoparticle cathode. Appl Phys Lett, 2002, 81: 358–360
Wu J F, Wyse M, McClain D, et al. Fabrication and field emission properties of triode-type carbon nanotube emitter arrays. Nano Lett, 2009, 9: 595–600
Ho J, Ono T, Tsai C H, et al. Photolithographic fabrication of gated self-aligned parallel electron beam emitters with a single-stranded carbon nanotube. Nanotechnology, 2008, 19: 365601
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Shao, P., Deng, S., Chen, J. et al. Fabrication and field emission performance of arrays of vacuum microdiodes containing CuO nanowire emitters grown directly on glass without a catalyst. Chin. Sci. Bull. 56, 906–911 (2011). https://doi.org/10.1007/s11434-010-4147-7
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DOI: https://doi.org/10.1007/s11434-010-4147-7