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Influence of Voltage Polarity on Electric Strength of Thin-Film Capacitors

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Russian Physics Journal Aims and scope

The paper reveals the peculiarities of the influence of the polarity reversal of voltage applied to the plates of thin-film capacitors on the change in the electric breakdown voltage. The reason for the decrease in the voltage of the first breakdown of a thin-film capacitor is established when the polarity of the applied voltage is reversed. This decrease is due to a strong increase in the electric field strength in the bulk of the dielectric due to the accumulation of a negative space charge on the micro-tips of the electrodes when the electrode was at a negative potential. This effect is observed in Al-SiO2-Al and Al-TiO2-Al capacitor structures, which allows to assume its versatility and extend it to the entire spectrum of dielectric films used in microelectronics.

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References

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Authors and Affiliations

  1. Tomsk State University of Control Systems and Radioelectronics, Tomsk, Russia

    Yu. V. Sakharov & A. E. Subbotina

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  1. Yu. V. Sakharov
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  2. A. E. Subbotina
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Correspondence to Yu. V. Sakharov.

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Translated from Izvestiya Vysshikh Uchebnykh Zavedenii, Fizika, No. 3, pp. 92–96, March, 2022.

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Sakharov, Y.V., Subbotina, A.E. Influence of Voltage Polarity on Electric Strength of Thin-Film Capacitors. Russ Phys J 65, 493–498 (2022). https://doi.org/10.1007/s11182-022-02660-y

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  • DOI: https://doi.org/10.1007/s11182-022-02660-y

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