Skip to main content
SpringerLink
Log in

Inducing LIPSS on multilayer thin metal films by femtosecond laser beam of different orientations

  • Published:
Optical and Quantum Electronics Aims and scope Submit manuscript

Abstract

The occurrence of laser-induced periodic surface structures (LIPSS) has been known for a while. Multilayer thin films, like Al/Ti, are suitable for LIPSS formation and attractive for applications—due to their wearing behavior and corrosion resistance; LIPSS generation may improve their properties as well. LIPSS properties depend not only on the material but also on the beam characteristics, like wavelength, polarization and scanning directions, etc. After exposing with NIR femtosecond pulses from Coherent Mira 900 laser system in several beam exposures, we have analyzed the samples of thin metal film systems with Tescan Mira3 SEM and NTegra AFM. The formation of LIPSS is most probably due to the generation of surface plasmon polariton, through the periodic distribution of energy in the interaction zone which lead to thermal processes in layers and interfaces. Two types of LIPSS were generated, which differ in shape, orientation and in ablation pronounced or not. For consecutive interactions in the same direction, LIPSS maintained its orientation, while for orthogonal passes LIPSS with mutually orthogonal orientation were generated. LIPSS period fluctuated between 320 and 380 nm and structures with pronounced ablation have significantly smaller width. Probable mechanism is that for greater accumulated energy pronounced ablation takes place giving LIPSS in the form of trenches or grooves, while for less accumulated energy the buildup of the material—probably due to pronounced oxidation—lead to LIPSS in the form of hills or ridges.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5

Similar content being viewed by others

References

  • Anisimov, S.I., Kapeliovich, B.L., Perel’man, T.L.: Electron emission from metal surface exposed to ultrashort laser pulses. Sov. Phys. JETP 39, 375–377 (1974)

    ADS  Google Scholar 

  • Beltaos, A., Kovačević, A.G., Matković, A., Ralević, U., Savić-Šević, S., Jovanović, Dj, Jelenković, B.M., Gajić, R.: Femtosecond laser induced periodic surface structures on multi-layer graphene. J. Appl. Phys. 116, 204306 (2014)

    Article  ADS  Google Scholar 

  • Birnbaum, M.: Semiconductor surface damage produced by ruby lasers. J. Appl. Phys. 36, 3688–3689 (1965)

    Article  ADS  MathSciNet  Google Scholar 

  • Bonse, J., Krüger, J.: Pulse number dependence of laser-induced periodic surface structures for femtosecond laser irradiation of silicon. J. Appl. Phys. 108, 034903 (2010)

    Article  ADS  Google Scholar 

  • Bonse, J., Munz, M., Sturm, H.: Structure formation on the surface of indium phosphide irradiated by femtosecond laser pulses. J. Appl. Phys. 97, 013538 (2005)

    Article  ADS  Google Scholar 

  • Bonse, J., Rosenfeld, A., Krueger, J.: Implications of transient changes of optical and surface properties of solids during femtosecond laser pulse irradiation to the formation of laser-induced periodic surface structures. Appl. Surf. Sci. 257, 5420–5423 (2011)

    Article  ADS  Google Scholar 

  • Bonse, J., Krüger, J., Höhm, S., Rosenfeld, A.: Femtosecond laser-induced periodic surface structures. J. Laser Appl. 24, 042006 (2012)

    Article  ADS  Google Scholar 

  • Bonse, J., Höhm, S., Rosenfeld, A., Krüger, J.: Sub-100-nm laser-induced periodic surface structures upon irradiation of titanium by Ti:sapphire femtosecond laser pulses in air. Appl. Phys. A 110, 547–551 (2013)

    Article  ADS  Google Scholar 

  • Dostovalov, A.V., Korolkov, V.P., Terentyev, V.S., Okotrub, K.A., Dultsev, F.N., Babin, S.A.: Study of the formation of thermochemical laser-induced periodic surface structures on Cr, Ti, Ni and NiCr films under femtosecond irradiation. Quantum Electron. 47, 631–637 (2017)

    Article  ADS  Google Scholar 

  • Dostovalov, A.V., Derrien, T.J.-Y., Lizunov, S.A., Přeučil, F., Okotrub, K.A., Mocek, T., Korolkov, V.P., Babin, S.A., Bulgakova, N.M.: LIPSS on thin metallic films: new insights from multiplicity of laser-excited electromagnetic modes and efficiency of metal oxidation. Appl. Surf. Sci. 491, 650–658 (2019a)

    Article  ADS  Google Scholar 

  • Dostovalov, A.V., Okotrub, K.A., Bronnikov, K.A., Terentyev, V.S., Korolkov, V.P., Babin, S.A.: Influence of femtosecond laser pulse repetition rate on thermochemical laser-induced periodic surface structures formation by focused astigmatic Gaussian beam. Laser Phys. Lett. 16, 026003 (2019b)

    Article  ADS  Google Scholar 

  • Gakovic, B., Radu, C., Zamfirescu, M., Radak, B., Trtica, M., Petrovic, S., Panjan, P., Zupanic, F., Ristoscu, C., Mihailescu, I.N.: Femtosecond laser modification of multilayered TiAlN/TiN coating. Surf. Coat. Technol. 206, 411–416 (2011)

    Article  Google Scholar 

  • Golosov, E.V., Ionin, A.A., Kolobov, Yu.R., Kudryashov, S.I., Ligachev, A.E., Makarov, S.V., Novoselov, Yu.N., Seleznev, L.V., Sinitsyn, D.V., Sharipov, A.R.: Near-threshold femtosecond laser fabrication of one-dimensional subwavelength nanogratings on a graphite surface. Phys. Rev. B 83, 115426 (2011)

    Article  ADS  Google Scholar 

  • Kautek, W., Rudolph, P., Daminelli, G., Kruger, J.: Physico-chemical aspects of femtosecond-pulse-laser-induced surface nanostructures. Appl. Phys. A 81, 65–70 (2005)

    Article  ADS  Google Scholar 

  • Kovačević, A.G., Petrović, S.M., Bokić, B.M., Gaković, B.M., Bokorov, M.T., Vasić, B.Z., Gajić, R.B., Trtica, M.S., Jelenković, B.M.: Surface nanopatterning of Al/Ti multilayer thin films and Al single layer by a low-fluence UV femtosecond laser beam. Appl. Surf. Sci. 326, 91–98 (2015)

    Article  ADS  Google Scholar 

  • Kovačević, A.G., Petrović, S., Lazović, V., Peruško, D., Pantelić, D., Jelenković, B.M.: Inducing subwavelength periodic nanostructures on multilayer NiPd thin film by low-fluence femtosecond laser beam. Appl. Surf. Sci. 417, 155–159 (2017)

    Article  ADS  Google Scholar 

  • Majchrzak, E., Poteralska, J.: Two-temperature microscale heat transfer model. Part I: determination of electron parameters. Sci. Res. Inst. Math. Comput. Sci. Czestochowa Univ. Technol. 9, 99–108 (2010a)

    Google Scholar 

  • Majchrzak, E., Poteralska, J.: Two-temperature microscale heat transfer model Part II: Determination of lattice parameters. Sci. Res. Inst. Math. Comput. Sci. Czestochowa Univ. Technol. 9, 109–119 (2010b)

    Google Scholar 

  • Öktem, B., Pavlov, I., Ilday, S., Kalaycıoğlu, H., Rybak, A., Yavaş, S., Erdoğan, M., Ilday, F.Ö.: Nonlinear laser lithography for indefinitely large area nanostructuring with femtosecond pulses. Nat. Photonics 7, 897 (2013)

    Article  ADS  Google Scholar 

  • Reif, J., Varlamova, O., Costache, F.: Femtosecond laser induced nanostructure formation: self-organization control parameters. Appl. Phys. A 92, 1019–1024 (2008)

    Article  ADS  Google Scholar 

  • Shinoda, M., Gattass, R.R., Mazur, E.: Femtosecond laser-induced formation of nanometer-width grooves on synthetic single-crystal diamond surfaces. J. Appl. Phys. 105, 053102 (2009)

    Article  ADS  Google Scholar 

  • Sipe, J.E., Young, J.F., Preston, J.S., van Driel, H.M.: Laser-induced periodic surface structure. I. Theory. Phys. Rev. B 27, 1141–1154 (1983)

    Article  ADS  Google Scholar 

  • Ursu, I., Mihăilescu, I.N., Prokhorov, A.M., Konov, V.I., Tokarev, V.N.: On the role of the periodical structures induced by powerful laser irradiation of metallic surfaces in the energy coupling process. Phys. B+C 132, 395–402 (1985)

    Article  ADS  Google Scholar 

  • Van Driel, H.M., Sipe, J.E., Young, J.F.: Laser-induced periodic surface structure on solids: a universal phenomenon. Phys. Rev. Lett. 49, 1955–1958 (1982)

    Article  ADS  Google Scholar 

  • Varlamova, O., Martens, C., Ratzke, M., Reif, J.: Genesis of femtosecond-induced nanostructures on solid surfaces. Appl. Opt. 53, I10–I15 (2014)

    Article  Google Scholar 

  • Von der Linde, D., Sokolowski-Tinten, K., Bialkowski, J.: Laser–solid interaction in the femtosecond time regime. Appl. Surf. Sci. 109–110, 1 (1997)

    Article  Google Scholar 

  • Vorobyev, A.Y., Guo, C.: Femtosecond laser-induced periodic surface structure formation on tungsten. J. Appl. Phys. 104, 063523 (2008)

    Article  ADS  Google Scholar 

  • Vorobyev, A.V., Guo, C.: Direct femtosecond laser surface nano/microstructuring and its applications. Laser Photonics Rev. 7, 385–407 (2013)

    Article  ADS  Google Scholar 

  • Vorobyev, A.Y., Makin, V.S.: Periodic ordering of random surface nanostructures induced by femtosecond laser pulses on metals. J. Appl. Phys. 101, 034903 (2007)

    Article  ADS  Google Scholar 

  • Wang, J., Guo, C.: Ultrafast dynamics of femtosecond laser-induced periodic surface pattern formation on metals. Appl. Phys. Lett. 87, 251914 (2005)

    Article  ADS  Google Scholar 

  • Young, J.F., Sipe, J.E., van Driel, H.M.: Laser-induced periodic surface structure. III. Fluence regimes, the role of feedback, and details of the induced topography in germanium. Phys. Rev. B 30, 2001–2015 (1984)

    Article  ADS  Google Scholar 

Download references

Acknowledgements

The work was supported by the Ministry of Science of the Republic of Serbia under No. III45016, OI171038 and OI171005. The authors appreciate the valuable help from: Dr. Davor Peruško (Institute of Nuclear Sciences “Vinča”, University of Belgrade), Dr. Aleksandar Krmpot, Dr. Mihajlo Rabasović, Dr. Svetlana Savić-Šević and Vladimir Lazović (Institute of Physics, University of Belgrade), Dr. Đorđe Veljović and Dr. Željko Radovanović (Faculty of Technology and Metallurgy, University of Belgrade).

Author information

Authors and Affiliations

  1. Institute of Physics, University of Belgrade, Belgrade, Serbia

    Aleksander G. Kovačević, Branislav Salatić, Marina Lekić, Borislav Vasić, Radoš Gajić, Dejan Pantelić & Branislav M. Jelenković

  2. Institute of Nuclear Sciences “Vinča”, University of Belgrade, Belgrade, Serbia

    Suzana M. Petrović

Authors
  1. Aleksander G. Kovačević
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. Suzana M. Petrović
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. Branislav Salatić
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. Marina Lekić
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. Borislav Vasić
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. Radoš Gajić
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. Dejan Pantelić
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. Branislav M. Jelenković
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to Aleksander G. Kovačević.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

This article is part of the Topical Collection on Advanced Photonics Meets Machine Learning.

Guest Edited by Goran Gligoric, Jelena Radovanovic and Aleksandra Maluckov.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Kovačević, A.G., Petrović, S.M., Salatić, B. et al. Inducing LIPSS on multilayer thin metal films by femtosecond laser beam of different orientations. Opt Quant Electron 52, 301 (2020). https://doi.org/10.1007/s11082-020-02398-2

Download citation

  • Received:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1007/s11082-020-02398-2

Keywords

Search

Navigation