Abstract
Laser thermochemical recording is a flexible method for direct writing the binary planar structures (for instance, diffractive optical elements) by a local laser-induced oxidation of thin metal films. Unfortunately, due to excess of influencing parameters, search for regimes of high-resoluted recording could be complicated. The presented article proposes the way to analyze the hard-to-reach regimes of laser recording by modeling them with more convenient regimes (with different geometric and/or thermochemical parameters) based on their physical similarity.
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Acknowledgements
Authors would like to thank V.P.Korolkov’s research group for stimulation our interest to a discussed problem. The work is supported by grant from Russian Science Foundation #17-19-01721.
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Veiko, V.P., Nguyen, Q.D., Shakhno, E.A. et al. Physical similarity of the processes of laser thermochemical recording on thin metal films and modeling the recording of submicron structures. Opt Quant Electron 51, 348 (2019). https://doi.org/10.1007/s11082-019-2073-8
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DOI: https://doi.org/10.1007/s11082-019-2073-8