Abstract
Laser thermochemical writing is a powerful technique for direct recording of planar structures performed by a local laser oxidation of thin metal films. It is commonly used for producing diffraction optical elements, and a main challenge in this field is a necessity of a resolution enhancement. The presented article provides a theoretical analysis and the discussion of physical–chemical and processing factors that should be taken into account to raise a resolution. It is shown for example that writing on a thin chromium film by multiple low-power laser beams simultaneously few times subsequently allows to provide a recording with high resolution (up to 4 lines per µm) and productivity.
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References
Bäuerle, D.W.: Laser Processing and Chemistry. Springer, Berlin (2011)
Bunkin, F.V., Kirichenko, N.A., Luk’yanchuk, B.S.: Thermochemical action of laser radiation. Sov. Phys. Uspekhi. 25, 662–687 (1982)
Gorbunov, A.A., Eichler, H., Pompe, W., Huey, B.: Lateral self-limitation in the laser-induced oxidation of ultrathin metal films. Appl. Phys. Lett. 69, 2816–2818 (1996)
Guo, C.F., Zhang, J., Miao, J., Fan, Y., Liu, Q.: MTMO grayscale photomask. Opt. Express 18, 2621–2631 (2010)
Kim, J.-G., Cho, S.-H., Je, T.-J., Choi, D.-S., Whang, K.-H.: Surface pattern formation on Cr thin film with ultrafast laser pulse. J. Appl. Phys. A 101, 345–348 (2010)
Koronkevich, V.P., Poleshchuk, A.G., Churin, E.G., Yurlov, Y.I.: Laser thermochemical technology of synthesis of diffractive optical elements in chromium films. Quantum Electron. 12, 755–761 (1985)
Libenson, M.N.: Laser-Induced Optical and Thermal Processes in Condensed Matter and Their Mutual Influence. Nauka, St.Petersburg (2007)
Mansoor, S.B., Yilbas, B.S.: Laser short-pulse heating of silicon–aluminum thin films. Opt. Quantum Electron. 42, 601–618 (2011)
Metev, S., Savtchenko, S.: Thermochemical laser lithography on the basis of local oxidation of thin metal films. Interfaces Under Laser Irradiat. 134, 371–384 (1987)
Poleshchuk, A.G., Churin, E.G., Koronkevich, V.P., Korolkov, V.P.: Polar coordinate laser pattern generator for fabrication of diffractive optical elements with arbitrary structure. Appl. Opt. 38, 1295–1301 (1999)
Shakhno, E.A., Sinev, D.A., Kulazhkin, A.M.: Features of laser oxidation of thin films of titanium. J. Opt. Technol. 81, 298–302 (2014)
Ursu, I., Birjega, M.I., Dinescu, M., Mihailescu, I.N., Popescu-Pogrion, N., Ribco, L., Prokhorov, A.M., Konov, V.I., Tokarev, V.N.: Excimer laser induced crystallization and oxidation of amorphous Cr thin films. Appl. Surf. Sci. 36, 640–647 (1989)
Veiko, V.P., Kotov, G.A., Libenson, M.N., Nikitin, M.N.: Thermochemical action of laser radiation. Sov. Phys. Dokl. 18, 83–85 (1973)
Veiko, V.P., Tuchkova, E.A., Yakovlev, E.B.: On the resolution of the laser lithography on thin metal films. Sov. J. Quantum Electron. 14, 449–452 (1984)
Veiko, V.P., Shakhno, E.A., Poleshchuk, A.G., Korolkov, V.P., Matyzhonok, V.N.: Local laser oxidation of thin metal films: ultra-resolution in theory and in practice. J. Laser Micro/Nanoeng. 3, 201–205 (2008)
Veiko, V.P., Sinev, D.A., Shakhno, E.A., Poleshchuk, A.G., Sametov, A.R., Sedukhin, A.G.: Researching the features multibeam laser thermochemical recording of diffractive microstructures. Comput. Opt. 36, 562–571 (2012a)
Veiko, V.P., Jarchuk, M.V., Ivanov, A.I.: Diffusionless oxidation and structure modification of thin Cr films by the action of ultrashort laser pulses. Laser Phys. 22, 1310–1316 (2012b)
Veiko, V.P., Shakhno, E.A., Sinev, D.A.: The increasement of resolution of laser thermochemical direct writing at thin chromium films by using the repeated processing. Izvestiya vysshikh uchebnykh zavedeniy. Priborostroenie 56, 57–61 (2013)
Veiko, V.P., Poleshchuk, A.G.: Laser-induced local oxidation of thin metal films: physical fundamentals and applications. In: Veiko, V.P., Konov, V.I. (eds.) Fundamentals of Laser-Assisted Micro- and Nanotechnologies, pp. 149–171. Springer, Heidelberg (2014)
Wang, Y., Wang, R., Guo, C., Miao, J., Tian, Y., Renb, T., Liu, Q.: Path-directed and maskless fabrication of ordered TiO2 nanoribbons. Nanoscale 4, 1545–1548 (2012)
Yilbas, B.S., Mansoor, S.B.: Laser short-pulse heating of silicon–aluminum thin films. Opt. Quantum Electron. 44, 437–457 (2012)
Acknowledgments
Authors would like to thank A.G. Poleschuk’s research group for conducting the experimental work that underlies the theoretical modeling. The work is supported by grants from Russian Foundation for Basic Research 14-29-07227 and from Russian Science Foundation 14-12-00351.
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This article is part of the Topical Collection on Laser technologies and laser applications.
Guest Edited by José Figueiredo, José Rodrigues, Nikolai A. Sobolev, Paulo André and Rui Guerra.
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Veiko, V.P., Shakhno, E.A. & Sinev, D.A. Laser thermochemical writing: pursuing the resolution. Opt Quant Electron 48, 322 (2016). https://doi.org/10.1007/s11082-016-0594-y
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DOI: https://doi.org/10.1007/s11082-016-0594-y