Abstract
We report on growth, fabrication and characterization of the metal–semiconductor–metal (MSM) photodiode based on type-II ZnSe/ZnTe heterostructure. Heterostructure was grown on semi-insulating GaAs substrates by MOVPE. For the first time we present the results of experimental investigations of the MSM photodetector on the base of type-II ZnSe/ZnTe superlattice. The MSM-photodetector demonstrates very low dark current, high current sensitivity and external quantum efficiency. The maximum photoresponse of the MSM-detector at the wavelength 620 nm corresponds to current sensitivity 0.22 A/W and external quantum efficiency 44%. Photoresponse of the MSM-detector shows two peaks of response located at 620 nm and 870 nm. ZnSe/ZnTe type-II superlattice structure reduces the MSM-diode dark current significantly. For the MSM-diode with finger width and gap of 3 µm and 100 × 100 µm2 photosensitive area we have obtained dark current density 10−8 A/cm2 at room temperature.
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Alferov, ZhI: The history and future of semiconductor heterostructures. Semiconductors 32(1), 1–14 (1998)
Averine, S.V., Chan, Y.C., Lam, Y.L.: Geometry optimization of interdigitated Schottky-barrier metal–semiconductor–metal photodiode structures. Solid-State Electron. 45(3), 441–446 (2001)
Averin, S.V., Kuznetzov, P.I., Zhitov, V.A., Alkeev, N.V.: Solar-blind MSM-photodetectors based on AlGaN/GaN heterostrutures grown by MOCVD. Solid-State Electron. 52, 618–624 (2008)
Averin, S.V., Kuznetzov, P.I., Zhitov, V.A., Zakharov, L.Y., Kotov, V.M., Alkeev, N.V.: Wavelength selective UV/visible metal-semiconductor-metal photodetectors. Opt. Quantum Electron. 48(5), 303 (2016). https://doi.org/10.1007/s11082-016-0417-1
Borrello, S.R., Roberts, C.G.: Two color infrared focal plane array. Patent US 4956686 A (1990)
Cervera, C., Ribet-Mohamed, I., Taalat, R., Perez, J.P., Christol, P., Rodriguez, J.B.: Dark current and noise measurements of an InAs/GaSb superlattice photodiode operating in the midwave infrared domain. J. Electron. Mater. 41, 2714–2718 (2012)
Chang, S.J., Su, Y.K., Chen, W.R., Chen, J.F., Lan, W.H., Lin, W.J., Cherng, Y.T., Liu, C.H., Liaw, U.H.: ZnSTeSe metal-semiconductor-metal photodetectors. IEEE Photonics Technol. Lett. 14(2), 188–190 (2002)
Chen, W.R., Meen, T.H., Cheng, Y.C., Lin, W.J.: P-down ZnSTeSe/ZnSe/GaAs heterostructure photodiodes. IEEE Electron Device Lett. 27(5), 347–349 (2006)
Gautam, N., Kim, H.S., Kutty, M.N., Plis, E., Dawson, L.R., Krishna, S.: Performance improvement of longwave infrared photodetector based on type-II InAs/GaSb superlattices using unipolar current blocking layers. Appl. Phys. Lett. 96(23), 231107-1–231107-3 (2010)
Esaki, L.: InAs-GaSb superlattices-synthesized semiconductors and semimetals. J. Cryst. Growth 52(1), 227–240 (1981)
Haddadi, A., Suo, X.V., Adhikary, S., Dianat, P., Chevallier, R., Hoang, A.M., Razeghi, M.: High-performance shortwavelength infrared photodetectors based on type-II InAs/InAs1−xSbx/AlAs1−xSbx superlattices. Appl. Phys. Lett. 107(14), 141104-1–141104-4 (2015)
Hoang, A.M., Dehzangi, A., Adhikary, S., Razeghi, M.: High performance bias-selectable three-color short-wave/mid-wave/long-wave infrared photodetectors based on type-II InAs/GaSb/AlSb superlattices. Sci. Rep. 6, 24144-1–24144-7 (2016)
Huang, J., Ma, W., Zhang, Y., Cao, Y., Liu, K., Huang, W., Lu, S.: Narrow-band type II superlattice photodetector with detection wavelength shorter than 2 μm. IEEE Photon. Technol. Lett. 27(21), 2276–2279 (2015)
Ito, M., Wada, M.: Low dark current GaAs metal-semiconductor-metal (MSM) photodiodes using W-Six contacts. J. Quantum Electron. 22(22), 1073–1077 (1986)
Ledentsov, N.N., Bohler, J., Beer, M., Heinrichsdorff, F., Grundmann, M., Bimberg, D., Ivanov, S.V., Meltser, B.Y., Shaposhnikov, S.V., Yassievich, I.N., Faleev, N.N., Kop’ev, P.S., Alferov, Z.I.: Radiative states in type-II GaSb/GaAs quantum wells. Phys. Rev. B 52(19), 14058–14066 (1995)
Lin, T.K., Chang, S.J., Su, Y.K., Chiou, Y.Z., Wang, C.K., Chang, S.P., Chang, C.M., Tang, J.J., Huang, B.R.: ZnSe4 MSM photodetectors prepared on GaAs and ZnSe substrates. Mater. Sci. Eng. B 119, 202–205 (2005)
Plis, E.A.: InAs/GaSb type-II superlattice detectors. Hindawi Publishing Corporation, Advances in Electronics, 2014, article ID 246769, p. 12 (2014) and references therein. http://dx.doi.org/10.1155/2014/246769
Sai-Halasz, G.A., Tsu, R., Esaki, L.: A new semiconductor superlattice. Appl. Phys. Lett. 30, 651–653 (1977)
Smith, D.L., Mailhiot, C.: Proposal for strained type-II superlattice infrared detectors. J. Appl. Phys. 62, 2545–2548 (1987)
Steenbergen, E.H., DiNezza, M.J., Dettlaff, W.H.G., Lim, S.H., Zhang, Y.-H.: Optically-addressed two-terminal multicolor photodetector. Appl. Phys. Lett. 97, 161111 (2010). https://doi.org/10.1063/1.3505137
Zhang, Y., Ma, W., Huang, J., Cao, Y., Liu, K., Huang, W., Zhao, Ch., Ji, H., Yang, T.: Pushing detection wavelength toward 1 μm by type II InAs/GaAsSb superlattices with AlSb insertion layers. IEEE Electron Device Lett. 37(9), 1166–1169 (2016)
Acknowledgements
We thank V.D. Shcherbakov, V.O. Yapaskurt and for their help in carrying out the experiments on energy-dispersive X-ray analysis and M.P. Temiryazeva for atomic-force microscopy of the samples. This work was partly supported by RFFI (Russian Fund of Fundamental Investigations), Grant No. 17-07-00205.
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Averin, S.V., Kuznetzov, P.I., Zhitov, V.A. et al. Electrical, optical and spectral characteristics of type-II ZnSe/ZnTe/GaAs superlattice and MSM-photodetector on their base. Opt Quant Electron 50, 368 (2018). https://doi.org/10.1007/s11082-018-1623-9
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DOI: https://doi.org/10.1007/s11082-018-1623-9