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Mode shift detection of coupled resonators through parametric resonance and its application to mass sensing

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Abstract

The eigenmode shift in weakly coupled resonators is used for ultra-sensitive micro-mass measurements. For operation in viscous environments, positive velocity feedback is often applied to compensate for the damping effect on the resonators. In the feedback, the real-time sensing of the displacement or velocity of the resonators is essential and in downsizing, a relatively large noise produced in a specific sensor for the velocity or displacement of the resonator may degrade the detection of the mode shift. In this study, we propose using parametric resonance to detect the mode shift without feedback control. Applying the harmonic balance method to an analytical model of coupled cantilevers, we clarify the unstable parameter region in which the resonators are parametrically excited with the first or second eigenmode. We also experimentally confirm without a special environment such as high vacuum, i.e., in air, that the parametrically excited coupled cantilevers produce a highly sensitive mode shift depending on the added mass. The sensitivity of the proposed method is increased by a factor of about \({{10}^{3}}\) in the first mode and \({{10}^{2}}\) in the second mode compared with the sensitivity in the conventional method based on the natural frequency shift of a single resonator.

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Data availability

The datasets of the current study are available from the corresponding author on reasonable request.

References

  1. Zhang, H., Marma, M.S., Bahl, S.K., Kim, E.S., McKenna, C.E.: Sequence specific label-free DNA sensing using film-bulk-acoustic-resonators. IEEE Sens. J. 7(12), 1587 (2007)

    Article  Google Scholar 

  2. Lee, S., Cho, J., Lee, Y., Jeon, S., Cha, H.J., Moon, W.: Measurement of hepatitis B surface antigen concentrations using a piezoelectric microcantilever as a mass sensor. J. Sens. (2012). https://doi.org/10.1155/2012/217958

    Article  Google Scholar 

  3. Ilic, B., Yang, Y., Craighead, H.G.: Virus detection using nanoelectromechanical devices. Appl. Phys. Lett. 85(13), 2604 (2004)

    Article  Google Scholar 

  4. Hajjam, A., Pandiyan, J., Rahafrooz, A., Pourkamali, S.: MEMS resonant sensors for detection of gasoline vapor. In: SENSORS, 2010 IEEE (IEEE, 2010), pp. 1538–1541

  5. Nomani, M.W., Kersey, D., James, J., Diwan, D., Vogt, T., Webb, R.A., Koley, G.: Highly sensitive and multidimensional detection of NO2 using In2O3 thin films. Sens. Actuators B Chem. 160(1), 251 (2011)

    Article  Google Scholar 

  6. Chen, G.Y., Thundat, T., Wachter, E., Warmack, R.: Adsorption-induced surface stress and its effects on resonance frequency of microcantilevers. J. Appl. Phys. 77(8), 3618 (1995)

    Article  Google Scholar 

  7. Narducci, M., Figueras, E., Lopez, M.J., Gracia, I., Santander, J., Ivanov, P., Fonseca, L., Cané, C.: Sensitivity improvement of a microcantilever based mass sensor. Microelectron. Eng. 86(4–6), 1187 (2009)

    Article  Google Scholar 

  8. Karimpour, M., Ghaderi, R., Raeiszadeh, F.: Vibration response of piezoelectric microcantilever as ultrasmall mass sensor in liquid environment. Micron 101, 213 (2017)

    Article  Google Scholar 

  9. Lee, Y., Lim, G., Moon, W.: A self-excited micro cantilever biosensor actuated by PZT using the mass micro balancing technique. Sens. Actuators A Phys. 130, 105 (2006)

    Article  Google Scholar 

  10. Mouro, J., Tiribilli, B., Paoletti, P.: A versatile mass-sensing platform with tunable nonlinear self-excited microcantilevers. IEEE Trans. Nanotechnol. 17(4), 751 (2018)

    Article  Google Scholar 

  11. Spletzer, M., Raman, A., Wu, A.Q., Xu, X., Reifenberger, R.: Ultrasensitive mass sensing using mode localization in coupled microcantilevers. Appl. Phys. Lett. 88(25), 254102 (2006)

    Article  Google Scholar 

  12. Wang, D.F., Li, X., Yang, X., Ikehara, T., Maeda, R.: Enhancing amplitude changes by mode localization in trio cantilevers with mass perturbation. J. Micromech. Microeng. 25(9), 095017 (2015)

    Article  Google Scholar 

  13. Thiruvenkatanathan, P., Yan, J., Woodhouse, J., Aziz, A., Seshia, A.: Ultrasensitive mode-localized mass sensor with electrically tunable parametric sensitivity. Appl. Phys. Lett. 96(8), 081913 (2010)

    Article  Google Scholar 

  14. Wood, G.S., Zhao, C., Pu, S.H., Boden, S.A., Sari, I., Kraft, M.: Mass sensor utilising the mode-localisation effect in an electrostatically-coupled MEMS resonator pair fabricated using an SOI process. Microelectron. Eng. 159, 169 (2016)

    Article  Google Scholar 

  15. Lyu, M., Zhao, J., Kacem, N., Liu, P., Tang, B., Xiong, Z., Wang, H., Huang, Y.: Exploiting nonlinearity to enhance the sensitivity of mode-localized mass sensor based on electrostatically coupled MEMS resonators. Int. J. Non-Linear Mech. 121, 103455 (2020)

    Article  Google Scholar 

  16. Wang, Y., Zhao, C., Wang, C., Cerica, D., Baijot, M., Xiao, Q., Stoukatch, S., Kraft, M.: A mass sensor based on 3-DOF mode localized coupled resonator under atmospheric pressure. Sens. Actuators A Phys. 279, 254 (2018)

    Article  Google Scholar 

  17. Rabenimanana, T., Walter, V., Kacem, N., Le Moal, P., Bourbon, G., Lardiès, J.: Functionalization of electrostatic nonlinearities to overcome mode aliasing limitations in the sensitivity of mass microsensors based on energy localization. Appl. Phys. Lett. 117(3), 033502 (2020)

  18. Yabuno, H., Seo, Y., Kuroda, M.: Self-excited coupled cantilevers for mass sensing in viscous measurement environments. Appl. Phys. Lett. 103(6), 063104 (2013)

    Article  Google Scholar 

  19. Endo, D., Yabuno, H., Higashino, K., Yamamoto, Y., Matsumoto, S.: Self-excited coupled-microcantilevers for mass sensing. Appl. Phys. Lett. 106(22), 223105 (2015)

    Article  Google Scholar 

  20. Endo, D., Yabuno, H., Yamamoto, Y., Matsumoto, S.: Mass sensing in a liquid environment using nonlinear self-excited coupled-microcantilevers. J. Microelectromech. Syst. 27(5), 774 (2018)

    Article  Google Scholar 

  21. Fairbairn, M., Moheimani, S.: Resonant control of an atomic force microscope micro-cantilever for active Q control. Rev. Sci. Instrum. 83(8), 083708 (2012)

    Article  Google Scholar 

  22. Alhazza, K.A., Daqaq, M.F., Nayfeh, A.H., Inman, D.J.: Non-linear vibrations of parametrically excited cantilever beams subjected to non-linear delayed-feedback control. Int. J. Non-Linear Mech. 43(8), 801 (2008)

    Article  Google Scholar 

  23. Mouro, J., Tiribilli, B., Paoletti, P.: Nonlinear behaviour of self-excited microcantilevers in viscous fluids. J. Micromech. Microeng. 27(9), 095008 (2017)

    Article  Google Scholar 

  24. Lübbe, J., Temmen, M., Rode, S., Rahe, P., Kühnle, A., Reichling, M.: Thermal noise limit for ultra-high vacuum noncontact atomic force microscopy. Beilstein J. Nanotechnol. 4(1), 32 (2013)

    Article  Google Scholar 

  25. Zhang, W., Turner, K.L.: A mass sensor based on parametric resonance. In: Proceedings of the workshop on solid-state sensors and actuators, pp. 49–52 (2004)

  26. Yie, Z., Miller, N.J., Shaw, S.W., Turner, K.L.: Parametric amplification in a resonant sensing array. J. Micromech. Microeng. 22(3), 035004 (2012)

    Article  Google Scholar 

  27. Zhang, W., Baskaran, R., Turner, K.L.: Effect of cubic nonlinearity on auto-parametrically amplified resonant MEMS mass sensor. Sens. Actuators A Phys. 102(1–2), 139 (2002)

    Article  Google Scholar 

  28. Prakash, G., Raman, A., Rhoads, J., Reifenberger, R.G.: Parametric noise squeezing and parametric resonance of microcantilevers in air and liquid environments. Rev. Sci. Instrum. 83(6), 065109 (2012)

  29. Szemplińska-Stupnicka, W.: The generalized harmonic balance method for determining the combination resonance in the parametric dynamic systems. J. Sound Vib. 58(3), 347 (1978)

    Article  Google Scholar 

  30. Bolotin, V.V.: The Dynamic Stability of Elastic Systems. Holden-Day, San Francisco (1964)

    MATH  Google Scholar 

  31. Zhao, C., Wood, G.S., Xie, J., Chang, H., Pu, S.H., Kraft, M.: A force sensor based on three weakly coupled resonators with ultrahigh sensitivity. Sens. Actuators A Phys. 232, 151 (2015)

    Article  Google Scholar 

  32. Ekinci, K., Roukes, M.: Nanoelectromechanical systems. Rev. Sci. Instrum. 76(6), 061101 (2005)

    Article  Google Scholar 

  33. Cleland, A.N., Roukes, M.L.: Noise processes in nanomechanical resonators. J. Appl. Phys. 92(5), 2758 (2002)

    Article  Google Scholar 

  34. Nayfeh, A.H., Mook, D.T.: Nonlinear Oscillations. John Wiley & Sons, New York (1979)

  35. Rhoads, J.F., Shaw, S.W., Turner, K.L., Baskaran, R.: Tunable microelectromechanical filters that exploit parametric resonance. J. Vib. Acoust. 127(5), 423 (2005)

    Article  Google Scholar 

  36. Kasai, Y., Yabuno, H., Yamamoto, Y., Matsumoto, S.: Ultra-sensitive minute mass sensing using a microcantilever virtually coupled with a virtual cantilever. Sensors 20(7), 1823 (2020)

    Article  Google Scholar 

Download references

Acknowledgements

The present study was supported in part by a Grant-in-Aid for Scientific Research B (No. 16H02318) from the Japan Society for the Promotion of Science (JSPS). Mark Kurban from Edanz Group (https://www.jp.edanz.com/ac) edited a draft of this manuscript.

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Correspondence to Wakaba Enami.

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Appendices

Appendix

A: The sensitivity depending on the position of added mass

The dependency of the mode shift on the position of added mass is theoretically examined under the external excitation [17]. The closer the mass is to the tip, the higher the sensitivity of mass measurement becomes. This result is experimentally shown also in the case under the parametric resonance as follows. Figure 6 shows the experimental results using the system mentioned in Sect. 3.1. The ordinate and abscissa are normalized by the total length of the beam and the eignmode shift in the case when the mass is added at the tip, respectively.

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figure 6

Eigenmode shift of the parametrically excited coupled cantilevers depending on the position of added mass.

B: Validity of the three-term harmonic balance

Comparing with the stability boundary numerically obtained by 4th-Runge–Kutta method, we employ the three harmonic functions. For \(\gamma =0.8\), the details are as follows.

Figure 7 shows the stability boundaries where the red, blue and green lines stand for the results by the one-term, two-term, and three-term harmonic balance methods, respectively. The numerically obtained results are shown by the plots; the circle and cross denote the combination of the excitation amplitude and frequency for the stable and unstable trivial steady states, respectively. The stability boundary obtained by the three-term harmonic balance method agrees with that by the numerical simulation. Therefore, we employ the three terms in the harmonic balance method.

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figure 7

Stability boundaries of the parametric resonance with the first mode obtained by the one-, two-, and three-term harmonic balance methods. The circle and cross denote the stability of the trivial steady state numerically obtained by 4th-order Runge–Kutta method.

C: Experimental identification of the damping coefficient

The non-dimensional damping coefficient \(\gamma \) of Eq. (2) is experimentally identified as follows.

We consider the state where one of the two cantilevers can oscillate and the other one is fixed. The equation governing the bending vibration can be expressed as

$$\begin{aligned} \rho A \frac{\partial ^{2} v}{\partial t^{2}}+c \frac{\partial v}{\partial t}+E I \frac{\partial ^{4} v}{\partial x^{4}}=0, \end{aligned}$$
(14)

where \(\rho \) is the cantilever density, A is the cross-sectional area, c is the damping coefficient, E is the Young’s modulus of the constitutive material, and I is the moment of inertia of the cross section. We introduce the representative length (total length) L and the representative time \(T^{\prime }=L^2 \sqrt{\rho A / E I}/\omega \), where \(\omega \) is the minimum value satisfying the following equation:

$$\begin{aligned} 1+\cos \omega ^{2} \cosh \omega ^{2}=0. \end{aligned}$$
(15)

Then, Eq. (14) is rewritten as

$$\begin{aligned} \ddot{v}+2 \gamma \dot{v}+\frac{1}{\omega ^{2}} v^{\prime \prime \prime \prime }=0, \end{aligned}$$
(16)

where \(\gamma =c L^{2} /(2 \omega \sqrt{\rho A E I})\). The dots and primes denote the partial derivative with respect to the nondimensional time \(t^*=t/T\) and ordinate, \(x^*=x/L\), respectively. Substituting \(v=U(t^{*}) \phi {(x^{*})}\) into Eq. (16) yields

$$\begin{aligned} \ddot{U}+2 \gamma \dot{U}+U=0, \end{aligned}$$
(17)
$$\begin{aligned} \phi ^{\prime \prime \prime \prime }-\omega ^{2} \phi =0. \end{aligned}$$
(18)

The following boundary conditions are imposed on the equation of \(\phi \):

$$\begin{aligned} \phi (0)=0, \end{aligned}$$
(19)
$$\begin{aligned} \phi ^{\prime }(0)=0, \end{aligned}$$
(20)
$$\begin{aligned} \phi ^{\prime \prime }(1)=0, \end{aligned}$$
(21)
$$\begin{aligned} \phi ^{\prime \prime \prime }(1)=0. \end{aligned}$$
(22)

In the case of \(0<\gamma <1\), the solution of Eq. (17) is

$$\begin{aligned} U =U_{0} e^{-\gamma t^{*}} \cos t^{*}. \end{aligned}$$
(23)
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figure 8

Experimental results at the excitation frequencies that are in the neighborhood of twice the natural frequency of the first and second modes. Time histories of the cantilevers without the mass in a the first mode and b the second mode. FFT analyses for the time history of the cantilevers without the mass in c the first mode and d the second mode. The predominant frequency spectrums are at c 6.450 Hz and d 6.460 Hz, respectively. FFT analyses for the time history of the vibrator in e the first mode and f the second mode. The predominant frequency spectrums are e 0.116 mm at 12.90 Hz and f 0.121 mm at 12.92 Hz, respectively.

or in the dimensional form

$$\begin{aligned} U =U_{0} e^{-\gamma \Omega t} \cos \Omega t, \end{aligned}$$
(24)

where \(\Omega =1 / T^{\prime }\). Letting the maximum displacement be \(t_{n}\) and the maximum one after the one period be \(t_{n+1}\), \(\gamma \) is expressed by using the logarithmic decrement as

$$\begin{aligned} \gamma =\frac{1}{2 \pi } \log \frac{U(t_{n})}{U(t_{n+1})}. \end{aligned}$$
(25)

Since Eq. (17) corresponds to the dimensionless equation of motion of the simple pendulum model in the manuscript, we can obtain \(\gamma \) in Eq. (2) from the experimental free oscillation of the cantilever by using Eq. (24).

D: Experimental results in the case when the excitation amplitude is much lower

We conducted the experiments using the coupled cantilevers whose first and second natural frequencies are 6.450 Hz and 6.460 Hz, respectively. In Fig. 8, we show the experimental results in the case when the excitation amplitude is much lower, i,e., \(a_e=0.12\) mm. Also in this case, the first or second mode is selectively resonated depending on the parametric excitation frequency.

E: Schematic and experimental diagrams of the mode shapes

In the first and second modes, the two cantilevers oscillate in phase and out of phase, respectively. They are schematically described in Fig. 9a and b. Figure 10a and b shows experimentally obtained first and second modes under the parametric excitation, respectively.

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figure 9

Schematic diagram of the mode shapes. a First mode. b Second mode.

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figure 10

Experimentally obtained oscillations. a First mode. b Second mode.

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Enami, W., Yabuno, H., Yamamoto, Y. et al. Mode shift detection of coupled resonators through parametric resonance and its application to mass sensing. Nonlinear Dyn 110, 117–129 (2022). https://doi.org/10.1007/s11071-022-07637-7

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