Skip to main content
SpringerLink
Log in

Analysis of Factors Affecting the Accuracy of Three-Dimensional Reconstruction of the Surface of Objects with Submicrometer Relief Obtained by Scanning Electron Microscope Stereo Images

  • Published:
Measurement Techniques Aims and scope

We present analysis results of factors influencing the systematic error in 3-D reconstruction of surface reliefs based on stereo images obtained using the scanning electron microscope S-4800. The typical size for the surface relief elements is less than 1 μm. The main sources of the error are found. It is shown that for typical samples the main factor influencing the systematic error of 3-D reconstruction is the parallax measurement error.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1

Similar content being viewed by others

References

  1. J. Goldstein, D. Newbury, and D. Joy, Scanning Electron Microscopy and x-Ray Microanalysis, Kluwer Academic, Plenum Publishers, New York (2003), 3rd ed.

    Book  Google Scholar 

  2. G. Piazzesi, “Photogrammetry with the scanning electron microscope,” J. Phys. E: Sci. Instrum., 6, No. 4, 392–396 (1973).

    Article  ADS  Google Scholar 

  3. F. Marinello, P. Bariani, E. Savio, et al., “Critical factors in SEM 3D stereo microscopy.” Meas. Sci. Technol., 19, No. 6, 065705-1–12 (2008).

    Article  ADS  Google Scholar 

  4. L. Carli, G. Genta, A. Cantatore, et al., “Uncertainty evaluation for three-dimensional scanning electron microscope reconstructions based on the stereo-pair technique,” Meas. Sci. Technol., 22, No. 3, 035103-1–11 (2011).

    Article  ADS  Google Scholar 

  5. P. Bariani, L. De Chiffre, H. N. Hansen, and A. Horsewell, “Investigation on the traceability of three-dimensional scacaning electron microscope measurements based on the stereo-pair technique,” Precis. Eng., 29, 219–228 (2005).

    Article  Google Scholar 

  6. GOST P 8.736-2011, GSI. DirectRrepeated Measurements. Methods for Processing the Measurement Results. Main Provisions.

  7. GOST P 8.636-2007, GSI. Microscopes with Electronic Raster. Methods of Calibration.

  8. V. P. Gavrilenko, D. A. Karabanov, A. Yu. Kuzin, et al., “Three-dimensional reconstruction of surface relief structures on stereo images obtained in a scanning electron microscope,” Izmer. Tekhn., No. 3, 15–18 (2015).

Download references

This work was supported by the Russian Ministry of Education and Science in the framework of the Federal Targeted Program on Research and Development on Priority Directions in Developing the Scientific-Technological Complex of Russia for 2014–2020 (Agreement No. 14.576.21.0027, unique project identifier RFMEFI57614X0027).

Author information

Authors and Affiliations

  1. All-Russia Research Institute of Metrological Service (VNIIMS), Moscow, Russia

    A. Yu. Kuzin

  2. National Research Center Kurchatov Institute, Moscow, Russia

    A. L. Vasil’ev & A. A. Mikhutkin

  3. Institute of Crystallography, Russian Academy of Sciences, Moscow, Russia

    A. L. Vasil’ev

  4. Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV), Moscow, Russia

    V. B. Mityukhlyaev, P. A. Todua & M. N. Filippov

  5. Moscow Institute of Physics and Technology (State University), Dolgoprudny, Moscow Oblast, Russia

    P. A. Todua & M. N. Filippov

Authors
  1. A. Yu. Kuzin
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. L. Vasil’ev
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. V. B. Mityukhlyaev
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. A. A. Mikhutkin
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. P. A. Todua
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. M. N. Filippov
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to P. A. Todua.

Additional information

Translated from Izmeritel’naya Tekhnika, No. 3, pp. 20–23, March, 2016.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Kuzin, A.Y., Vasil’ev, A.L., Mityukhlyaev, V.B. et al. Analysis of Factors Affecting the Accuracy of Three-Dimensional Reconstruction of the Surface of Objects with Submicrometer Relief Obtained by Scanning Electron Microscope Stereo Images. Meas Tech 59, 230–234 (2016). https://doi.org/10.1007/s11018-016-0948-7

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11018-016-0948-7

Keywords

Search

Navigation