Skip to main content
SpringerLink
Log in

Experimental Study of Three-Dimensional Reconstruction of Relief Structures from Stereo Images Obtained in a Scanning Electron Microscope

  • NANOMETROLOGY
  • Published:
Measurement Techniques Aims and scope

We present research results of three-dimensional surface reconstruction from stereo images of silicon structures with trapezoidal profile of the relief elements. The stereo images were obtained from a scanning electron microscope. We compared results from transmission scanning electron and atomic force microscopy. It was found that the formation of an insular film of gold on the surface of the test object can increase the accuracy of the results of the three-dimensional reconstruction. Reconstruction error for a protrusion height of 597–600 nm was less than 4%.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3

Similar content being viewed by others

References

  1. J. Goldstein, D. Newbury, and D. Joy, Scanning Electron Microscopy and x-Ray Microanalysis, Kluwer Academic, Plenum Publishers, New York (2003).

  2. A. A. Mikhutkina and A. L. Vasiliev, “Three-dimensional surface reconstruction from images obtained in a scanning electron microscope,” Crystallography, 59, No. 6, 999–1007 (2014).

  3. F. Marinello, P. Bariani, E. Savio, et al., “Critical factors in SEM 3D stereo microscopy,” Meas. Sci. Technol., 19, No. 6, 065705-1–065705-12 (2008).

  4. V. P. Gavrilenko, D. A. Karabanov, A. Yu. Kuzin, et al., “Three-dimensional reconstruction of surface relief structures from stereo images obtained in a scanning electron microscope,” Izmer. Tekhn., No. 3, 15–18 (2015).

  5. V. P. Gavrilenko, V. B. Mityukhlyaev, Yu. A. Novikov, et al., “Test object of the linewidth with a trapezoidal profile and three certified sizes for an SEM and AFM,” Meas. Sci. Technol., 20, 084022 (2009).

    Article  ADS  Google Scholar 

  6. Yu. Kuzin, V. B. Mityuhlyaev, V. B. Mikhutkina, et al., “Analysis of factors affecting the accuracy of three-dimensional surface reconstruction of objects with submicrometer relief from scanning electron microscope stereo images,” Izmer. Tekhn., No. 3, 20–23 (2016).

Download references

Author information

Authors and Affiliations

  1. All-Russia Research Institute of Metrological Service (VNIIMS), Moscow, Russia

    A. Yu. Kuzin

  2. National Research Center Kurchatov Institute, Moscow, Russia

    A. L. Vasil’ev, A. A. Mikhutkin & M. Yu. Presnyakov

  3. Institute of Crystallography, Russian Academy of Sciences, Moscow, Russia

    A. L. Vasil’ev

  4. Research Center for the Study of the Properties of Surfaces and Vacuum (NITsPV), Moscow, Russia

    D. A. Karabanov, V. B. Mityukhlyaev, P. A. Todua & M. N. Filippov

  5. Moscow Institute of Physics and Technology (State University), Dolgoprudnyi, Moscow Region, Russia

    P. A. Todua & M. N. Filippov

Authors
  1. A. Yu. Kuzin
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. A. L. Vasil’ev
    View author publications

    You can also search for this author in PubMed Google Scholar

  3. D. A. Karabanov
    View author publications

    You can also search for this author in PubMed Google Scholar

  4. V. B. Mityukhlyaev
    View author publications

    You can also search for this author in PubMed Google Scholar

  5. A. A. Mikhutkin
    View author publications

    You can also search for this author in PubMed Google Scholar

  6. M. Yu. Presnyakov
    View author publications

    You can also search for this author in PubMed Google Scholar

  7. P. A. Todua
    View author publications

    You can also search for this author in PubMed Google Scholar

  8. M. N. Filippov
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to D. A. Karabanov.

Additional information

Translated from Izmeritelnaya Tekhnika, No. 8, pp. 21–24, August, 2016.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Kuzin, A.Y., Vasil’ev, A.L., Karabanov, D.A. et al. Experimental Study of Three-Dimensional Reconstruction of Relief Structures from Stereo Images Obtained in a Scanning Electron Microscope. Meas Tech 59, 817–821 (2016). https://doi.org/10.1007/s11018-016-1050-x

Download citation

  • Received:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s11018-016-1050-x

Keywords

Search

Navigation