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A test object with three certified linewidth dimensions for a scanning electron microscope

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Measurement Techniques Aims and scope

A test object for a scanning electron microscope, which has a trapezoidal profile of the relief with large angles of inclination of the side walls, is developed. The test object contains elements (protrusions) with three certified dimensions of the linewidth, situated in two mutually perpendicular directions.

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References

  1. International Technology Roadmap for Semiconductos. Metrology Roadmap (2007).

  2. State Standard GOST R 8.636-2007, GSI, Scanning Electron Microscopes: Calibration Procedure.

  3. State Standard GOST R 8.628-2007, GSI, Nanometer Band Relief Standards. Requirements on Geometrical Shapes, Linear Dimensions, and the Choice of Material for Manufacture.

  4. Ch. P. Volk et al., Mikroelektronika, 31, No. 4, 243 (2002).

    Google Scholar 

  5. C. G. Frase et al., Nanoscale Calibration Standards and Methods: Dimensional and Related Measurements in the Micro-and Nanometer Range. Edited by G. Wilkening and L. Koenders, WILEY-VCH Verlag GmbH and Co. KgaA, Weinheim (2005).

    Google Scholar 

  6. Yu. A. Novikov et al., Trudy IOFAN, 62, 36 (2006).

    Google Scholar 

  7. Yu. A. Novikov, A. V. Rakov, and P. A. Todua, Proc. SPIE, 6260, 626015 (2006).

  8. C. G. Frase et al., Meas. Sci. Tech., 18, No. 2, 439 (2007).

    Article  ADS  Google Scholar 

  9. Yu. A. Novikov et al., Proc. SPIE, 6648, 66480R (2007).

  10. Protocol of Collations Results of the Relief Elements Widthline of Measure GWPS-2.0Si (sample No. A1), Braunschweig, Moscow (2005).

  11. I. Brodie and J. Muray, Physical Principles of Microtechnology [Russian translation], Mir, Moscow (1985).

    Google Scholar 

  12. Ch. P. Volk et al., Trudy IOFAN, 62, 77 (2006).

    Google Scholar 

  13. W. Hassler-Grohne and H. Bosse, Meas. Sci. Tech., 9, 1120 (1998).

    Article  ADS  Google Scholar 

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Authors and Affiliations

  1. Research Center for the Study of the Properties of Surfaces and Vacuum, Moscow, Russia

    M. A. Danilova, V. B. Mityukhlyaev & P. A. Todua

  2. Prokhorov Institute of General Physics, Russian Academy of Sciences, Moscow, Russia

    Yu. A. Novikov & A. V. Rakov

  3. NIIME and Mikron Factory, Moscow, Russia

    Yu. V. Ozerin

Authors
  1. M. A. Danilova
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  2. V. B. Mityukhlyaev
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  3. Yu. A. Novikov
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  4. Yu. V. Ozerin
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  5. A. V. Rakov
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  6. P. A. Todua
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Corresponding author

Correspondence to M. A. Danilova.

Additional information

Translated from Izmeritel'naya Tekhnika, No. 9, pp. 49–52, September, 2008.

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Danilova, M.A., Mityukhlyaev, V.B., Novikov, Y.A. et al. A test object with three certified linewidth dimensions for a scanning electron microscope. Meas Tech 51, 998–1003 (2008). https://doi.org/10.1007/s11018-008-9152-8

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  • DOI: https://doi.org/10.1007/s11018-008-9152-8

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