Abstract
A comparator that incorporates an imaging system and a position-sensitive detector is developed. The comparator supports the formation of spectro-zonal images with calibration in units of radiance and radiant intensity through the use of synchrotron radiation. A comparator is needed to obtain information about the distribution of the radiance of plasma radiators used in nanolithography in the area of extremal vacuum ultraviolet radiation.
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Reference
E. N. Ragozin, Encyclopedia of Low-Temperature Plasma [in Russian], Vol. 2, Nauka, Moscow (2000), p. 507.
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Translated from Izmeritel’naya Tekhnika, No. 5, pp. 41–45, May, 2007.
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Minaev, R.V. Investigations of the spatial distribution of the energy characteristics of plasma radiators for a system of assurance of uniformity of measurements in nanolithography. Meas Tech 50, 519–523 (2007). https://doi.org/10.1007/s11018-007-0103-6
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DOI: https://doi.org/10.1007/s11018-007-0103-6