Abstract
Coherent short-wavelength plasma radiation demonstrated a number of advantages for nano-inspection. Contending technologies are here discussed and strategies for X-ray laser optimizations are highlighted, thus bridging the gap between proof-of-principle or enabling tools.
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Acknowledgements
The present work was supported by the Swiss National Science Foundation under the grant number PP00P2-133564/1. Contributions from F. Staub, J.E. Balmer, L. Masoudnia, M. Ruiz-Lopez, Th. Feurer are acknowledged.
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Bleiner, D. (2014). Coherent Short-Wavelength Plasma Radiation for Lab-scale Nano-inspection Tools. In: Sebban, S., Gautier, J., Ros, D., Zeitoun, P. (eds) X-Ray Lasers 2012. Springer Proceedings in Physics, vol 147. Springer, Cham. https://doi.org/10.1007/978-3-319-00696-3_7
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DOI: https://doi.org/10.1007/978-3-319-00696-3_7
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