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Effect of annealing atmosphere on structure and photoluminescence of ZnMgO thin films

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Abstract

In order to deeply understand the effect of annealing atmosphere on the structure and luminescence performance of ZnMgO films, self-made targets were used to prepare Mg incorporated ZnO thin films on quartz glass substrates in a nitrogen atmosphere at 400 °C using pulsed laser deposition (PLD) method. The prepared ZnMgO films were subsequently annealed in air and vacuum atmospheres at 500 °C, respectively. X-ray diffraction (XRD), field emission scanning electron microscopy (FESEM), energy-dispersive spectrometer (EDS) and X-ray photoelectron spectroscopy (XPS) were used to analyze the structure, morphology, elemental composition and chemical state of the film. The photoluminescence (PL) spectra were measured using a fluorescence spectrophotometer. The results revealed that both the as-prepared and annealed samples exhibited a hexagonal wurtzite structure with the (002) orientation. However, the annealed samples show different degrees of secondary orientation growth (SOG) due to the influence of annealing oxygen pressure. After air annealing, the SOG is more pronounced, resulting in larger grain size and a stronger (002) diffraction peak. After air annealing, the films were more prone to forming oxygen interstitials (Oi), while vacuum annealing favored the formation of zinc interstitials (Zni). The PL spectrum shows a strong ultraviolet emission peak (372–385 nm) and a weak red emission peak (730–760 nm), and the mechanisms behind these two emission peaks are discussed.

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Data availability

The data that support the findings of this study are available from the corresponding author, upon reasonable request.

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Funding

This work is supported by National Natural Science Foundation of China (Project No. 11975173).

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Authors and Affiliations

  1. College of Science, Wuhan University of Science and Technology, Wuhan, 430065, China

    Jing Luo, Hongyu Liu, Weijie Deng, Rengang Zhang & Chen He

  2. Hubei Province Key Laboratory of Systems Science in Metallurgical Process, Wuhan, 430065, China

    Hongyu Liu

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  1. Jing Luo
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  2. Hongyu Liu
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  3. Weijie Deng
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  5. Chen He
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Contributions

HL: provided ideas and guided the design of research plans, and JL: implemented the research process, collected and sorted out data and wrote a thesis. RZ, WD and CH: During the experiment, technical was supported.

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Correspondence to Hongyu Liu.

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Luo, J., Liu, H., Deng, W. et al. Effect of annealing atmosphere on structure and photoluminescence of ZnMgO thin films. J Mater Sci: Mater Electron 34, 2172 (2023). https://doi.org/10.1007/s10854-023-11473-9

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