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Modulation of Sn concentration in ZnO nanorod array: intensification on the conductivity and humidity sensing properties

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Abstract

Tin (Sn)-doped zinc oxide (ZnO) nanorod arrays (TZO) were synthesized onto aluminum-doped ZnO-coated glass substrate via a facile sonicated sol–gel immersion method for humidity sensor applications. These nanorod arrays were grown at different Sn concentrations ranging from 0.6 to 3 at.%. X-ray diffraction patterns showed that the deposited TZO arrays exhibited a wurtzite structure. The stress/strain condition of the ZnO film metamorphosed from tensile strain/compressive stress to compressive strain/tensile stress when the Sn concentrations increased. Results indicated that 1 at.% Sn doping of TZO, which has the lowest tensile stress of 0.14 GPa, generated the highest conductivity of 1.31 S cm−1. In addition, 1 at.% Sn doping of TZO possessed superior sensitivity to a humidity of 3.36. These results revealed that the optimum performance of a humidity-sensing device can be obtained mainly by controlling the amount of extrinsic element in a ZnO film.

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Acknowledgements

This work was supported by the ASEAN-India Research & Training Fellowship (IMRC/AISTDF/R&D/P-1/2017). The authors also would like to thank the Institute of Research Management and Innovation (IRMI) of UiTM and the Ministry of Higher Education of Malaysia for their financial support of this research.

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Authors and Affiliations

  1. NANO-ElecTronic Centre (NET), Faculty of Electrical Engineering, Universiti Teknologi MARA (UiTM), 40450, Shah Alam, Selangor, Malaysia

    A. S. Ismail, M. H. Mamat, M. M. Yusoff, R. Mohamed, W. R. W. Ahmad, M. A. R. Abdullah, N. D. Md. Sin & M. Rusop

  2. NANO-SciTech Centre (NST), Institute of Science (IOS), Universiti Teknologi MARA (UiTM), 40450, Shah Alam, Selangor, Malaysia

    M. H. Mamat, M. F. Malek & M. Rusop

  3. Department of Physics, B.S. Abdur Rahman University, Vandalur, Chennai, 600 048, India

    I. B. Shameem Banu

  4. Faculty of Applied Sciences, Universiti Teknologi MARA (UiTM), 40450, Shah Alam, Selangor, Malaysia

    M. F. Malek

  5. Faculty of Applied Sciences, Universiti Teknologi MARA (UiTM), 26400, Bandar Jengka, Pahang, Malaysia

    R. Mohamed

  6. Nanotechnology Research Centre, Faculty of Science and Mathematics, Universiti Pendidikan Sultan Idris (UPSI), 35900, Tanjung Malim, Perak, Malaysia

    A. B. Suriani

  7. Microelectronic and Nanotechnology – Shamsuddin Research Centre (MiNT-SRC), Faculty of Electrical and Electronic Engineering, Universiti Tun Hussein Onn Malaysia (UTHM), 86400, Batu Pahat, Johor, Malaysia

    M. K. Ahmad

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  1. A. S. Ismail
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Ismail, A.S., Mamat, M.H., Shameem Banu, I.B. et al. Modulation of Sn concentration in ZnO nanorod array: intensification on the conductivity and humidity sensing properties. J Mater Sci: Mater Electron 29, 12076–12088 (2018). https://doi.org/10.1007/s10854-018-9314-7

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