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The study of humidity sensor based on Li-doped ZnO nanorods by hydrothermal method

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Abstract

In this study, we report the one-dimension Li doped ZnO nanorods (NRs) on glass substrates with hydrothermal method, and the fabrication of Li doped ZnO NRs humidity sensors. It was found that the as-grown Li doped ZnO NRs were structurally evenly with a wurtzite structure. The relative humidity (RH) effect factor was found to be dependent on the ultraviolet (UV) illumination of humidity sensors with a nanostructure. During UV illumination, it was also found that photocurrent to dark current contrast ratios were approximately 17.6 and 14.5, when measured with RHs of 30 and 80%, respectively, at 5.0 V applied bias. The competitive surface effects of a great quantity oxygen/water to explain the observed variations in UV photodetector under different relative humidity conditions.

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Authors and Affiliations

  1. Department of Resources Engineering, National Cheng Kung University, Tainan, 701, Taiwan

    Chun-Chi Chou & Li-Hsing Shih

  2. Institute of Microelectronics and Department of Electrical Engineering, Center for Micro/Nano Science and Technology, Advanced Optoelectronic Technology Center, National Cheng Kung University, Tainan, 701, Taiwan

    Shoou-Jinn Chang

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  1. Chun-Chi Chou
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  2. Li-Hsing Shih
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  3. Shoou-Jinn Chang
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Correspondence to Chun-Chi Chou.

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Chou, CC., Shih, LH. & Chang, SJ. The study of humidity sensor based on Li-doped ZnO nanorods by hydrothermal method. Microsyst Technol 28, 423–427 (2022). https://doi.org/10.1007/s00542-020-04957-9

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  • DOI: https://doi.org/10.1007/s00542-020-04957-9

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