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Stability of the nitrogen-deficient Ti2AlN x MAX phase in Ar2+-irradiated (Ti,Al)N/Ti2AlN x multilayers

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Abstract

The effects of 100 keV Ar2+ ion irradiation on the structure and stability of multilayered dc sputtered and annealed thin films of (Ti,Al)N/Ti2AlN x have been investigated with X-ray diffraction and transmission electron microscopy. It is shown that the multilayer structure is preserved as well as the crystalline structures of both components. This demonstrates a high tolerance of the Ti2AlN x MAX phase in multilayers to damage induced by nuclear elastic interactions. It is suggested that damage recovery may originate from native nitrogen vacancies and from the interfaces that act as sinks for point defects, like Frenkel pairs, created during the irradiation.

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References

  1. Barsoum MW (2000) Prog Solid State Chem 28:201

    Article  CAS  Google Scholar 

  2. Wang J, Zhou Y-C (2009) Annu Rev Mater Res 39:415

    Article  CAS  ADS  Google Scholar 

  3. Eklund P, Beckers M, Jansson U, Högberg H, Hultman L (2010) Thin Solid Films 518:1851

    Article  CAS  ADS  Google Scholar 

  4. Beckers M, Höglund C, Baehtz C, Martins RMS, Persson POÅ, Hultman L, Möller W (2009) J Appl Phys 106:064915

    Article  ADS  Google Scholar 

  5. Joelsson T, Flink A, Birch J, Hultman L (2007) J Appl Phys 102:074918

    Article  ADS  Google Scholar 

  6. Beckers M, Schell N, Martins RMS, Mücklich A, Möller W, Hultman L (2007) J Appl Phys 102:074916

    Article  ADS  Google Scholar 

  7. Magnuson M, Mattesini M, Li S, Höglund C, Beckers M, Hultman L, Eriksson O (2007) Phys Res B 76:195127

    Article  ADS  Google Scholar 

  8. Persson POÅ, Kodambaka S, Petrov I, Hultman L (2007) Acta Mater 55:4401

    Article  CAS  Google Scholar 

  9. Wilhelmsson O, Eklund P, Giuliani F, Högberg H, Hultman L, Jansson U (2007) Appl Phys Lett 91:123124

    Article  ADS  Google Scholar 

  10. Fakih H, Jacques S, Berthet MP, Bosselet F, Dezellus O, Viala JC (2006) Surf Coat Technol 201:3748

    Article  CAS  Google Scholar 

  11. Borysiewicz MA, Kaminska E, Piotrowska A, Pasternak I, Jakiela R, Dynowska E (2008) Acta Phys Pol A 114:1061

    CAS  ADS  Google Scholar 

  12. Höglund C, Beckers M, Schell N, Borany JV, Birch J, Hultman L (2007) Appl Phys Lett 90:174106

    Article  ADS  Google Scholar 

  13. Dolique V, Jaouen M, Cabioc’h T, Pailloux F, Guérin Ph, Pélosin V (2008) J Appl Phys 103:083527

    Article  ADS  Google Scholar 

  14. Nappé JC, Grosseau Ph, Audubert F, Guilhot B, Beauvy M, Benabdesselam M, Monnet I (2009) J Nucl Mater 385:304

    Article  ADS  Google Scholar 

  15. Liu X, Le Flem M, Béchade J-L, Onimus F, Cozzika T, Monnet I (2010) Nucl Instrum Methods Phys Res B 268:506–512

    Article  CAS  ADS  Google Scholar 

  16. Le Flem M, Liu X, Doriot S, Cozzika T, Monnet I (2010) Int J Appl Ceram Tech (accepted)

  17. Ziegler JF, Biersack JP, Littmark U (1985) The stopping and range of ions in solids. Pergamon, New York. http://www.srim.org

  18. Egerton RF (1986) Electron energy-loss spectroscopy in the electron microscope. Plenum Press, New York

    Google Scholar 

  19. Raman A, Schubert K (1965) Z Metallkde 56:45

    Google Scholar 

  20. Hug G, Jaouen M, Barsoum MW (2005) Phys Rev B 71:024105

    Article  ADS  Google Scholar 

  21. Peruško D, Mitric M, Milinović V, Petrović S, Miloslavjević M (2008) J Mater Sci 43:2625. doi:10.1007/s10853-008-2477-5

    Article  ADS  Google Scholar 

  22. Albert Irudayaraj A, Srinivasan R, Kuppusami P, Mohandas E, Kalainathan S, Ramachandran K (2008) J Mater Sci 43:1114. doi:10.1007/s10853-007-2248-8

    Article  ADS  Google Scholar 

  23. Ohzawa Y, Cheng X, Achiha T, Nakajima T, Groult H (2008) J Mater Sci 43:2812. doi:10.1007/s10853-008-2537-x

    Article  CAS  ADS  Google Scholar 

  24. Roger J, Audubert F, Le Petitcorps Y (2010) J Mater Sci 45:3073. doi:10.1007/s10853-010-4314-x

    Article  CAS  Google Scholar 

  25. Haider J, Rahman M, Hashmi MSJ, Sarwar M (2008) J Mater Sci 43:3368. doi:10.1007/s10853-008-2471-y

    Article  CAS  ADS  Google Scholar 

  26. Wang H, Araujo R, Swadener JG, Wang YQ, Zhang X, Fu EG, Cagin T (2007) Nucl Instrum Methods Phys Res B 261:1162

    Article  CAS  ADS  Google Scholar 

  27. Perry AJ (1998) Mater Sci Eng A 253(1–2):310

    Google Scholar 

  28. Oda K, Nakayama A, Ohara H, Kitagawa N, Nomura T (1997) Nucl Instrum Methods Phys Res B 121:283

    Article  CAS  ADS  Google Scholar 

  29. Sansom D, Viviente JL, Alonso F, Ugarte JJ, Oate JI (1996) Surf Coat Technol 84(1–3):519

    Article  CAS  Google Scholar 

  30. Miloslavljević M, Peruško D, Milinović V, Stojanović Z, Zalar A, Kovać J, Jeynes C (2010) J Phys D 43:065302

    Article  ADS  Google Scholar 

  31. Peruško D, Webb MJ, Milinović V, Timotijević B, Miloslavjević M, Jeynes C, Webb RP (2008) Nucl Instrum Methods Phys Res B 266(8):1749

    Article  ADS  Google Scholar 

  32. Hübler R (2001) Nucl Instrum Methods Phys Res B 175–177:630

    Article  Google Scholar 

  33. Fayeulle S, Torri P, Nastasi M, Lu YC, Kung H, Tesmer JR (1997) Nucl Instrum Methods Phys Res B 127–128:198

    Article  Google Scholar 

  34. Jaouen M, Pacaud J, Jaouen C (2001) Phys Rev B 64:144106

    Article  ADS  Google Scholar 

  35. Martin F, Jaouen C, Pacaud J, Abadias G, Djemia Ph, Ganot F (2005) Phys Rev B 71:045422

    Article  ADS  Google Scholar 

  36. Debelle A, Michel A, Abadias G, Jaouen C (2006) Nucl Instrum Methods Phys Res B 242(1–2):461

    Article  CAS  ADS  Google Scholar 

  37. Abadias G, Michel A, Tromas C, Jaouen C, Dub SN (2007) Surf Coat Technol 202(4–7):844

    Article  CAS  Google Scholar 

  38. Zhang X, Li N, Anderoglu O, Wang H, Swadener JG, Höchbauer T, Misra A, Hoagland RG (2007) Nucl Instrum Methods Phys Res B 261(1–2):1129

    Article  CAS  ADS  Google Scholar 

  39. Demkowicz MJ, Hoagland RG, Hirth JP (2008) Phys Rev Lett 100:136102

    Article  CAS  PubMed  ADS  Google Scholar 

Download references

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Authors and Affiliations

  1. Département Physique et Mécanique des Matériaux, Institut Pprime, UPR 3346 CNRS, Université de Poitiers, ENSMA, SP2MI, Téléport 2, Boulevard Marie et Pierre Curie, BP 30179, 86962, Futuroscope Chasseneuil Cedex, France

    M. Bugnet, T. Cabioc’h, V. Mauchamp, Ph. Guérin, M. Marteau & M. Jaouen

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  1. M. Bugnet
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  2. T. Cabioc’h
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  3. V. Mauchamp
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  4. Ph. Guérin
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  5. M. Marteau
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  6. M. Jaouen
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Correspondence to M. Bugnet.

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Bugnet, M., Cabioc’h, T., Mauchamp, V. et al. Stability of the nitrogen-deficient Ti2AlN x MAX phase in Ar2+-irradiated (Ti,Al)N/Ti2AlN x multilayers. J Mater Sci 45, 5547–5552 (2010). https://doi.org/10.1007/s10853-010-4615-0

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  • DOI: https://doi.org/10.1007/s10853-010-4615-0

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