The results of ellipsometric, x-ray, and spectral studies of In2O3 films deposited by dc-magnetron sputtering on Al2O3 (012) substrates are presented. The experimental data are interpreted in terms of a three-layer model of the fi lm. It is assumed that large particles of the material are formed on the surface of the substrate at the beginning of the deposition process. The size of the crystallites then decreases, and they fill the gaps between the larger particles, after which the film formation goes into the stationary mode. It was shown that there is a transition layer with a band gap of 1.39 eV, a refractive index of ~3, and thickness of 25 nm at the interface between the film and the substrate. The properties of this layer do not depend on the deposition time.
Similar content being viewed by others
References
K. Arshak and K. Twomey, Sensors, 2, 205–218 (2002).
A. K. Yewale, K. B. Raulkar, A. S. Wadatkar, and G. T. Lamdhade, J. Electron Devices, 11, 544–550 (2011).
D. Мanno, M. Di Giulio, T. Siciliano, E. Filippo, and A. Serra, J. Phys. D: Appl. Phys., 34, 2097–2102 (2001).
Yu. M. Nikolaenko, A. N. Artemov, Yu. В. Medvedev, N. B. Efros, I. V. Zhikharev, I. Yu. Reshidova, A. A. Tikhii, and S. V. Kara-Murza, J. Phys. D: Appl. Phys., 49, 375302(1–7) (2016).
Xuejian Du, Jing Yu, Xianwu Xiu, Qianqian Sun, Wei Tang, and Baoyuan Man, Vacuum, 167, 1–5 (2019).
S. K. Yadav, S. Das, N. Prasad, B. K. Barick, S. Arora, D. S. Sutar, and S. Dhar, J. Vacuum Sci. Technol. A, 38, 033414 (2020).
M. Nistor, W. Seiler, C. Hebert, E. Matei, and J. Perrière, Appl. Surface Sci., 307, 455–460 (2014).
W. Seiler, M. Nistor, C. Hebert, and J. Perrière, Solar Energy Mater. Solar Cell., 116, 34–42 (2013).
S. Kaneko, H. Torii, M. Soga, K. Akiyama, M. Iwaya, M. Yoshimoto, and T. Amazawa, Jpn. J. Appl. Phys., 51, 01AC02l (2012).
M. Z. Jarzebski, Phys. Status Solidi (a), 71, 13–41 (1982).
Yu. M. Nikolaenko, A. B. Mukhin, V. A. Chaika, and V. V. Burkhovetskii, Tech. Phys., 80, 1189–1192 (2010).
A. A. Tikhii, Yu. M. Nikolaenko, Yu. I. Zhikhareva, and I. V. Zhikharev, Opt. Spectrosc., 128, 1667–1670 (2020).
A. Schleife, M. D. Neumann, N. Esser, Z. Galazka, A. Gottwald, J. Nixdorf, R. Goldhahn, and M. Feneberg, New J. Phys., 20, 053016 (2018).
H. G. Tompkins and E. A. Irene, Handbook of Ellipsometry, William Andrew Publishing, USA (2005).
N. M. Ravindra, P. Ganapathy, and J. Choi, Infrared Phys. Technol., 50, 21–29 (2007).
Author information
Authors and Affiliations
Corresponding author
Additional information
Translated from Zhurnal Prikladnoi Spektroskopii, Vol. 88, No. 5, pp. 743–747, September–October, 2021.
Rights and permissions
About this article
Cite this article
Tikhii, A.A., Svyrydova, K.A., Zhikhareva, Y.I. et al. Optical and X-Ray Investigation of Indium Oxide Films on Sapphire Substrates. J Appl Spectrosc 88, 975–979 (2021). https://doi.org/10.1007/s10812-021-01268-3
Received:
Published:
Issue Date:
DOI: https://doi.org/10.1007/s10812-021-01268-3