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A microfluidic flow-converter based on a double-chamber planar micropump

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Abstract

A microfluidic flow-converter that transforms an oscillatory flow into a steady-like flow in a reciprocating-type pumping device is successfully developed in this study. The flow quality at the outlet is found to be significantly improved. The present micro-device is composed of two single-chamber PZT micropumps in parallel arrangement and can be fabricated using simple micro-electro-mechanical-system (MEMS) techniques. Based on the concept of the electronic bridge converter, the flow rectification is supported by four passive planar valves. Two operation modes, in-phase and anti-phase, were used to test the performance of the present device. In addition, the flow characteristics at the outlet were examined by an externally triggered micro-PIV system. The results reveal that the current flow-converter provided both high volume and smoothly continuous flow rates at the outlet when it was in anti-phase mode. Moreover, the volume flow rate was linearly proportional to the excitation frequency within a specific frequency regime. This indicates that the flow-converter was easily operated and controlled. The present microfluidic flow-converter has great potential for integration into future portable micro- or bio-fluidic systems.

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Acknowledgments

This work was supported by Ministry of Economic Affairs, 97-EC-17-A-05-A1-0017, and National Science Council, NSC 95-2218-E-002-051-MY3 of Taiwan, R.O.C.

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Authors and Affiliations

  1. Institute of Applied Mechanics, National Taiwan University, No. 1, Sec. 4, Roosevelt Road, Taipei, 106, Taiwan, ROC

    Chia-Jui Hsu & Horn-Jiunn Sheen

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  1. Chia-Jui Hsu
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  2. Horn-Jiunn Sheen
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Correspondence to Horn-Jiunn Sheen.

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Hsu, CJ., Sheen, HJ. A microfluidic flow-converter based on a double-chamber planar micropump. Microfluid Nanofluid 6, 669–678 (2009). https://doi.org/10.1007/s10404-008-0347-8

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