Skip to main content
Log in

A bidirectional valveless piezoelectric micropump with double chambers based on Coanda effect

  • Technical Paper
  • Published:
Journal of the Brazilian Society of Mechanical Sciences and Engineering Aims and scope Submit manuscript

Abstract

Micropumps are essential parts of many microfluidic devices. The valveless micropump has the advantage of simple structure and easy manufacture. A bidirectional valveless piezoelectric micropump with double chambers based on Coanda effect has been presented in this paper. The micropump has better performance at low Reynolds number and can change the flow direction by regulating the voltage. The numerical simulations have been done for studying the performance of the micropumps. The results show the volume efficiency of the micropump can be over 50 %. The prototype micropump is fabricated by PMMA with precision machining and the experiment has been carried out to obtain the flow rate and back pressure. As only one piezoelectric actuator is excited and the voltage is set at 500 Vp–p, both the flow rate and back pressure reach the maximum which are 0.26 ml/min and 1.79 kPa, respectively, at the frequency of 10 Hz. As the other piezoelectric actuator is excited and the voltage reach 300 Vp–p, the flow rate and back pressure are 0.408 ml/min and 3.18 kPa, respectively, which are 57 and 78 % larger, respectively, than those at zero voltage.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12

Similar content being viewed by others

References

  1. van der Schoot BH, van den Berg A, Jeanneret S, de Rooij NF, Grisel A (1991) A miniaturized chemical analysis system using two silicon micro pumps. In: International conference on solid-state sensors and actuators. San Francisco, CA, USA, June 24–28, pp 789–791

  2. Schluter M, Kampmeyer U, Tahhan I, Lilienhof, HJ (2002) A modular structured, planar micro pump with no moving part (NMP) valve for fluid handling in microanalysis systems. In: 2nd annual international IEEE-EMB special topic conference on microtechnologies in medicine & biology. Madison, WI, USA, May 2–24, pp 500–503

  3. Kan JW, Yang ZG, Peng TJ, Cheng GM, Wu BD (2005) Design and test of a high-performance piezoelectric micropump for drug delivery. Sens Actuators A 121(1):156–161

    Article  Google Scholar 

  4. Cui QF, Liu CL, Zha XF (2007) Study on a piezoelectric micropump for controlled drug delivery system. Microfluid Nanofluid 3(4):377–390

    Article  Google Scholar 

  5. Zhang T, Wang QG (2005) Valveless piezoelectric micropump for fuel delivery in direct methanol fuel cell (DMFC) devices. J Power Sources 140(1):72–80

    Article  Google Scholar 

  6. Ma H, Chen B, Gao J (2009) Development of an OAPCP—micropump liquid cooling system in a laptop. Int Commun Heat Mass Transf 36(3):225–232

    Article  Google Scholar 

  7. Sheen HJ, Hsu CJ, Wu TH, Chu HC, Chang Chang, Lei U (2007) Experimental study of flow characteristics and mixing performance in a PZT self-pumping micromixer. Sens Actuators A 139(1–2):237–244

    Article  Google Scholar 

  8. Singhal V, Garimella SV, Raman A (2004) Microscale pumping technologies for microchannel cooling systems. Appl Mech Rev 57(1–6):191–221

    Article  Google Scholar 

  9. Smits JG (1990) Piezoelectric micropump with three valves working peristaltically. Sens Actuators A 21(1–3):203–206

    Article  Google Scholar 

  10. Van De Pol FCM, Van Lintel HTG, Elwenspoek M, Fluitman JHJ (1990) A thermopneumatic micropump based on micro-engineering techniques. Sens Actuators A 21(1–3):198–202

    Google Scholar 

  11. Zhang W, Ahn CH (1996) A bi-directional magnetic micropump on a silicon wafer. Technical Digest Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, USA, June, pp 94–97

  12. Benard WL, Kahn H, Heuter AH, Huff MA (1998) Thin-film shape-memory alloy actuated micropumps. J Microelectromech Syst 7(2):245–251

    Article  Google Scholar 

  13. Zengerle R, Richter A, Sandmaier H (1992) A micro membrane pump with electrostatic actuation. In: Proceedings of the IEEE micro electro mechanical systems workshop. Travemuende, Ger, Feb 4–7, pp 19–24

  14. Stemme E, Stemme G (1993) A valveless diffuser/nozzle based fluid pump. Sens Actuators A 39(2):159–167

    Article  Google Scholar 

  15. Gerlach T, Wurmus H (1995) Working principle and performance of the dynamic micropump. Sens Actuators A 50(1–2):135–140

    Article  Google Scholar 

  16. Forster FK, Bardell RL, Afromowitz MA, Sharma NR, Blanchard A (1995) Design fabrication and testing of fixed-valve micro-pumps. In: Proceedings of the 1995 ASME international mechanical congress and exposition. San Francisco, CA, USA, November 12–17, pp 39–44

  17. Izzo I, Accoto D, Menciassi A, Schmitt L, Dario P (2007) Modeling and experimental validation of a piezoelectric micropump with novel no-moving-part valves. Sens Actuators A 133(1):128–140

    Article  Google Scholar 

  18. Fadl A, Demming S, Zhang ZQ, Büttgenbach S, Krafczyk M, Meyer DML (2010) A multifunction and bidirectional valve-less rectification micropump based on bifurcation geometry. Microfluid Nanofluid 9(2–3):267–280

    Article  Google Scholar 

  19. Yuan SQ, Yang S, He XH, Deng ZD, Cai SC (2015) Design and experimental study of a novel three-way diffuser/nozzle elements employed in valveless piezoelectric micropumps. J Braz Soc Mech Sci Eng 37(1):221–230

    Article  Google Scholar 

  20. Singhal V, Gerimella V, Murthy Y (2004) Low Reynolds number flow through nozzle-diffuser elements in valveless micropumps. Sens Actuators A 113(2):226–235

    Article  Google Scholar 

  21. Wang YC, Hsu JC, Kuo PC, Lee YC (2009) Loss characteristics and flow rectification property of diffuser valves for micropump applications. Int J Heat Mass Transf 52(1–2):328–336

    Article  MATH  Google Scholar 

  22. Lee DS, Yoon HC, Ko JS (2004) Fabrication and characterization of a bidirectional valveless peristaltic micropump and its application to a flow-type immunoanalysis. Sensors Actuators B Chem 103(1–2):409–415

    Article  Google Scholar 

  23. Kim BH, Kim IC, Kang YJ, Ryu J, Sang JL (2014) Effect of phase shift on optimal operation of serial-connected valveless micropumps. Sens Actuators A 209:133–139

    Article  Google Scholar 

  24. Dinh TX, Dau VT, Ogami Y, Sugiyama S (2008) Numerical design and performance of a valveless micropump. In: International conference on advanced technologies for communications. Hanoi, Vietnam, October 6–9, pp 323–326

  25. Dinh TX, Dau VT, Sugiyama S, Pham PH (2010) Fluidic device with pumping and sensing functions for precise flow control. Sensors Actuators B Chem 150(2):819–824

    Article  Google Scholar 

  26. Gebhard U, Hein H, Just E, Ruther P (1997) Combination of a fluidic microoscillator and micro-actuator in LIGA technique for medical application. In: International conference on solid state sensors and actuators. Chicago, USA, June 16–19, pp 761–764

  27. Jeon MK, Kim JH, Noh J, Kim SH, Park HG, Woo SI (2005) Design and characterization of a passive recycle micromixer. J Micromech Microeng 15(2):346–350

    Article  Google Scholar 

  28. White FM (2009) Fluid mechanics, 7th edn. McGraw-Hill, New York

    Google Scholar 

Download references

Acknowledgments

This study was supported by National Natural Science Foundation of China (Grant No. 51276082) and Departments of Education and Finance, Jiangsu Province of P. R. China (A Project Funded by the Priority Academic Program Development of Jiangsu Higher Education institutions, PAPD) [SUZHENGBANFA (2014) No. 37].

Author information

Authors and Affiliations

Authors

Corresponding author

Correspondence to Xiuhua He.

Rights and permissions

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Yang, S., He, X., Yuan, S. et al. A bidirectional valveless piezoelectric micropump with double chambers based on Coanda effect. J Braz. Soc. Mech. Sci. Eng. 38, 345–353 (2016). https://doi.org/10.1007/s40430-015-0477-3

Download citation

  • Received:

  • Accepted:

  • Published:

  • Issue Date:

  • DOI: https://doi.org/10.1007/s40430-015-0477-3

Keywords

Navigation