Skip to main content

Advertisement

SpringerLink
Log in

Design of capacitive pressure sensor for continuous glucose monitoring system

  • Technical Paper
  • Published:
Microsystem Technologies Aims and scope Submit manuscript

Abstract

Capacitive sensor is best suitable sensor for the fabrication. In this study, we used Finite Element Method (FEM) tool to design and simulate capacitive pressure sensor based on the nob-linearity and sensitivity aspects. The sensor consists of parallel plates which is electrodes made up by optimizing two sensing devices that is microbridge and micro-cantilever with three different materials aluminium, gold and platinum. Among those aluminium is better due to its non-linearity and cost. The suitable sensing element is integrated into pressure sensor in order to measure the variation in glucose concentration levels.

This is a preview of subscription content, log in via an institution to check access.

Access this article

Log in via an institution

Price excludes VAT (USA)
Tax calculation will be finalised during checkout.

Instant access to the full article PDF.

Institutional subscriptions

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10

Similar content being viewed by others

Data availability

The data will be provided by authors upon reasonable request.

References

  • Bakhoum EG, Cheng MHM (2010) Novel capacitive pressure sensor. J Microelectromechan Syst 19(3):443

    Article  Google Scholar 

  • Balavalad K, Sheeparamatti BG (2015) A critical review of mems capacitive pressure sensors. Sensors Transducers. https://doi.org/10.17577/IJERTV4IS030671

    Article  Google Scholar 

  • Chen C, Zhao XL, Li ZH, Zhu ZG, Qian SH, Flewitt AJ (2017) Current and emerging technology for continuous glucose monitoring. Sensors 17:182

    Article  Google Scholar 

  • Chou J-C (2015) Fabrication and characteristic analysis of a remote real-time monitoring applied to glucose sensor system based on microfluidic framework”. IEEE Sens J 15:3234–3240

    Article  Google Scholar 

  • Muhammad Faris, Tayyab Ahmad Ansari, Tariq Javid, Abdul Haseeb, Muhammad Danish Mujib. (2017). Towards Design and Development of Noninvasive Glucose Monitoring System. IEEE

  • Feng J, Chen L, Li X, Zhang J (2021) Highly Sensitive Piezoresistive Sensors Based on a Voltage Divider Circuit With TFTs for Ultra-Low Pressure Detection. J Electron Devices Soc

  • Fenlan X, Li X, Shi Y, Li L, Wang W, He L, Liu R (2018) Recent developments for flexible pressure sensors: a review. Micromachines 9:580

    Article  Google Scholar 

  • Ficek R, Elias M, Zajickova L, Jasek On, Vrba R (2007) Gas pressure sensor based on PECVD grown carbon nanotubes. Mater Res Soc. https://doi.org/10.1557/PROC-1018-EE14-05

    Article  Google Scholar 

  • Girija Sravani K, Sai Lakshmi G, Srinivasa Rao K (2019) Design and optimization of piezoresistive materials based microbridge for electro-osmosis pressure sensor. Trans Electrical Electron Mater 20:198

    Article  Google Scholar 

  • Guha K, Sateesh J, Dutta A, Sengupta P, Srinivasa Rao K, Agarwal A (2019) Mimicking kidney re-absorption using microfluidics by considering hydrostatic pressure inside kidney tubules: structural and analytical study. Microsyst Technol 6:1769

    Google Scholar 

  • Wan Hafiy Wan Morshidi, Zarimin Zaharudin, Sheroz Khan. 2018. Anis Nurashikin Nordin, Faraz Ahmed Shaikh, Ismail Adam, Kushsairy Abdul Kader, “Inter-Digital Sensor For Non-Invasive Blood Glucose Monitoring. International Conference on Innovative Research and Development (ICIRD), IEEE

  • Huang X, LeDuc C, Ravussin Y, Li S, Song B, Wang Q, Accili D, Leibel R, Lin Q (2019) A mems differential dielectric sensor for continuous glucose monitoring. IEEE 29:910

    Google Scholar 

  • S.Jeyapriya and R.Ramalakshmi, (2017) Glucose Monitoring and Control in Diabetes Using GSM and Automatic Insulin Injector System for Human Bodies. International Conference On Intelligent Techniques In Control, Optimization And Signal Processing, IEEE

  • Li C, Cordovilla F (2010) Design and optimization of a novel structural MEMS piezoresistive pressure sensor. Microsyst Technol 23:4531

    Article  Google Scholar 

  • Li D, Li T, Zhang D (2011) A monolithic piezoresistive pressure-flow sensor with integrated signal-conditioning circuit. IEEE Sensors J. https://doi.org/10.1109/JSEN.2010.2096536

    Article  Google Scholar 

  • Li C, Francisco Cordovilla R, Jagdheesh JL (2016) Design and optimization of a novel structural MEMS piezoresistive pressure sensor”. Microsyst Technol 23:4531

    Article  Google Scholar 

  • Mahruz TA, Matin R, Wahid FB, Dev T (2016) Material and performance analysis of MEMS piezoresistive pressure sensor. Int J Eng Trends Technol. https://doi.org/10.14445/22315381/IJETT-V31P202

    Article  Google Scholar 

  • Markevicius V, Cepenas M, Andriukaitis D, Navikas D (2013) Blood glucose level estimation using interdigital electrodes. Elektronika Ir Elektrotechnika 19(6):71

    Google Scholar 

  • Melvås P, Stemme G (2023) A diode-based two-wire solution for temperature-compensated piezoresistive pressure sensors. IEEE Trans Electron Devices. https://doi.org/10.1109/TED.2003.809026

    Article  Google Scholar 

  • M. Norouznejad Jelodar, B. A. Ganji. 2016. Design of high sensitivity and linearity microelectromechanical systems capacitive tire pressure sensor using stepped membrane. International Journal of Engineering, March.

  • Prasant Kumar Pattnaik and Narayan Krishnaswamy. 2015 Application of MEMS based capacitive sensor for continuous monitoring of glucose. IEEE Sensors Journal. https://doi.org/10.1109/JSEN.2019.2962251

  • Pickup JC, Hussain F, Evans ND, Rolinski OJ, Birch DJ (2005) Fluorescence-based glucose sensors. Biosensors Bioelectron. https://doi.org/10.1016/j.bios.2004.10.002

    Article  Google Scholar 

  • Rao KS, Sateesh J, Guha K, Baishnab KL, Ashok P, Sravani KG (2020) Design and analysis of MEMS based piezoelectric micro pump integrated with micro needle. Microsyst Technol 26:3153

    Article  Google Scholar 

  • Rao KS, Chandrasekharam K, Sai Sri SB, Suma S, Hamza M, Sravani KG (2020) Design and performance analysis of PDMS based micropump. Trans Electr Electron Mater 21:497

    Article  Google Scholar 

  • Rao KS, Samyuktha W, Vardhan DV, Naidu BG, Kumar PA, Sravani KG, Guha K (2020) Design and sensitivity analysis of capacitive MEMS pressure sensor for blood pressure measurement. Microsyst Technol 26(6):2371

    Article  Google Scholar 

  • Rao KS, Vineetha KV, Sailaja BVS, Guha K, Maity NP, Maity R, Sravani KG (2021) Design, simulation and performance analysis bio-sensors for the detection of cholera and diarrhea using MEMS technology. Microsyst Technol 27:419

    Article  Google Scholar 

  • Sateesh J, Girija Sravani K, Akshay Kumar R, Koushik Guha K, Rao S (2017) Design and flow analysis of MEMS based piezo-electric micro pump. Microsyst Technol. https://doi.org/10.1007/s00542-017-3563-x

    Article  Google Scholar 

  • Sateesh J, Guha K, Dutta A, Pratim Sengupta K, Rao S (2019) Regenerating re-absorption function of proximal convoluted tubule using microfluidics for kidney onchip applications. SN Appl Sci. https://doi.org/10.1007/s42452-019-1840-2

    Article  Google Scholar 

  • Sravani KG, Ramakrishna D (2022) Design of Micropump with two stacked ring type piezoelectric actuators for drug delivery. J Micro-Bio Robot 17:69

    Article  Google Scholar 

  • Srinivasa R (2020) Design, simulation and analysis of micro electromechanical system microneedle for micropump in drug delivery systems. IET Nanobiotechnol. https://doi.org/10.1049/nbt2.12013

    Article  Google Scholar 

  • Srinivasa Rao K, Sai Lakshmi G (2019) Analysis of PDMS based MEMS device for drug delivery systems. Microsyst Technol 27:659

    Article  Google Scholar 

  • Srinivasa Rao K, Hamza Md, Ashok Kumar P, Girija Sravani K (2019) Design and optimization of MEMS based piezoelectric actuator for drug delivery systems. Microsyst Technol. https://doi.org/10.1007/s00542-019-04712-9

    Article  Google Scholar 

  • Srinivasa Rao K, Mohitha Reddy B, Bala Teja V, Krishnateja GVS, Ashok Kumar P, Ramesh KS (2020) Design and simulation of MEMS based capacitive pressure sensor for harsh environment. Microsyst Technol 26:1875–1880

    Article  Google Scholar 

  • Srinivasa Rao K, Samyuktha W et al (2020) Design and sensitivity analysis of capacitive MEMS pressure sensor for blood pressure measurement. Microsyst Technol 26(8):2371

    Article  Google Scholar 

  • Suraj S (2010) Nanocrystalline piezoresistive polysilicon film by aluminum-induced crystallization for pressure-sensing applications. IEEE Trans Nanotechnol. https://doi.org/10.1109/TNANO.2010.2054104

    Article  Google Scholar 

  • Tanaka Y, Tajima T (2020) Differential continuous wave photo acoustic spectroscopy for non-invasive glucose monitoring. IEEE Sensors J. https://doi.org/10.1109/JSEN.2019.2962251

    Article  Google Scholar 

  • Tanaka Y, Tajima T, Seyama M, Waki K (2019) Differential continuous wave photoacoustic spectroscopy for non-invasive glucose monitoring. IEEE Sensors J 25(5):4453

    Google Scholar 

  • Tran AV, Zhang X, Zhu B (2017) The development of a new piezoresistive pressure sensor for low pressures. IEEE Trans Indust Electron 65(8):6487

    Article  Google Scholar 

  • Vineetha KV, Girija Sravani K, Sailaja BVS, Ashok Kumar P, Guha K, Kr S, Kotamraju VSV, Prabhakar KS (2018) Performance analysis of MEMS sensor for the detection of cholera and diarrhea. Microsyst Technol. https://doi.org/10.1007/s00542-018-3810-9

    Article  Google Scholar 

  • Vineetha KV, Ashok Kumar P et al (2018) Design of MEMS sensor for the detection of cholera and diarrehea by capacitance modulation. Microsyst Technol. https://doi.org/10.1007/s00542-017-3702-4

    Article  Google Scholar 

  • Zhao Y, Li S, Davidson A, Yang B, Wang Q, Lin Q (2007) A MEMS viscometric sensor for continuous glucose monitoring. J Micromechan Microeng. https://doi.org/10.1088/0960-1317/17/12/020

    Article  Google Scholar 

Download references

Acknowledgements

The Authors would like to thank to NMDC supported by NPMASS, National Institute of Technology, Silchar for providing the necessary computational tools.

Author information

Authors and Affiliations

  1. VLSI-Microelectronics Research Center, Department of Electronics & Communication Engineering, Koneru Lakshmaiah Education Foundation (Deemed to Be University), Green Fields, Vaddewaram, 522502, Guntur, India

    G. Sai Lakshmi & K. Srinivasa Rao

Authors
  1. G. Sai Lakshmi
    View author publications

    You can also search for this author in PubMed Google Scholar

  2. K. Srinivasa Rao
    View author publications

    You can also search for this author in PubMed Google Scholar

Corresponding author

Correspondence to K. Srinivasa Rao.

Additional information

Publisher's Note

Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations.

Rights and permissions

Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law.

Reprints and permissions

About this article

Check for updates. Verify currency and authenticity via CrossMark

Cite this article

Lakshmi, G.S., Rao, K.S. Design of capacitive pressure sensor for continuous glucose monitoring system. Microsyst Technol (2024). https://doi.org/10.1007/s00542-023-05589-5

Download citation

  • Received:

  • Accepted:

  • Published:

  • DOI: https://doi.org/10.1007/s00542-023-05589-5

Search

Navigation