Abstract
Controlled drug delivery in medical application plays a prominent role, that can be achieved by micro-drug delivery devices. The efficient working of the controlled drug delivery system depends on the micropump in it. This paper presents theoretical, design and simulated analysis of piezoelectrically actuated micropump constructed using PZT-5H material, quartz channel, and a PDMS membrane. The designed micro pump is analyzed for different structural, material changes by considering turbulent and laminar flows. The turbulent flow model is having a flow rate of 0.039 µ3m/s, while laminar flow is having 0.029 µ3m/s at a less operating voltage of 5 V.
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Acknowledgements
The authors would like to thank NPMASS, Govt. of India for providing the necessary tools through NMDC Center throughout India. The author(Dr. K. Srinivasa Rao) would like to thank Science Engineering Research Board (SERB), Govt. of India for providing partial financial support to carry out this research work.(File no: ECR/2016/000757).
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Sateesh, J., Girija Sravani, K., Akshay Kumar, R. et al. Design and Flow Analysis of MEMS based Piezo-electric Micro Pump. Microsyst Technol 24, 1609–1614 (2018). https://doi.org/10.1007/s00542-017-3563-x
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DOI: https://doi.org/10.1007/s00542-017-3563-x