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Design of a packaging-friendly double-topology RF MEMS switch for space applications

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Abstract

This article presents the results of the research, design and a series of manufacturing steps of an RF-MEMS switch to be used in space communication systems. Design and measurement results are discussed. Double-topology geometry for anodic bonding is presented.

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Acknowledgements

This work has been supported by the Ministry of Education and Science of the Russian Federation under the Federal target program “Research and Development in Priority Directions of the Russian Science and Technology Complex in 2014–2020”; contract no. 14.579.21.0137; unique project identifier RFMEFI57916X0137. Experiments have been performed using the equipment of MIPT Shared Facilities Centre.

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Authors and Affiliations

  1. Bazovye Tekhnologii, LLC, Moscow, Russia

    Evgeny A. Savin

  2. Moscow Institute of Physics and Technology, Dolgoprudny, Moscow Region, Russia

    Roman V. Kirtaev

  3. Russian Space Systems, JSC, Moscow, Russia

    Andrey A. Zhukov & Pavel I. Didyk

Authors
  1. Evgeny A. Savin
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  2. Roman V. Kirtaev
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  3. Andrey A. Zhukov
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  4. Pavel I. Didyk
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Correspondence to Evgeny A. Savin.

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Savin, E.A., Kirtaev, R.V., Zhukov, A.A. et al. Design of a packaging-friendly double-topology RF MEMS switch for space applications. Microsyst Technol 25, 51–55 (2019). https://doi.org/10.1007/s00542-018-3929-8

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  • DOI: https://doi.org/10.1007/s00542-018-3929-8

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