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Microfabricated centrifugal pump driven by an integrated synchronous micromotor

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Abstract

This paper presents the development of a new design of the microfabricated centrifugal force pump. The pumping concept is based on running an impeller (a rotor including permanent magnets carrying straight and backward blades) within an integrated synchronous motor, which can be operated at different rotational speeds to pump water. The impeller is 5.5 mm in diameter, and is 1.5 mm in height. This micropump with 7-straight-blade impeller can operate smoothly up to a rotational speed of 9000 rpm. It can deliver a non-pulsating maximum flow rate of up to 12 ml/min and allows water to be pumped up to a 24 cm water head. Additionally, the micropump with the backward-blade-impeller pump delivered a flow rate of up to 14.3 ml/min. at a rotational speed of 11,400 rpm with no back pressure. The micropump was patterned using a series of microfabrication processes including sputtering, photolithography and electroplating within a clean room. Such a pump can be integrated into a system of a compact size and can provide a wide range of flow rates. It could also be a promising device for use within biological and micro biomedical fields. To our knowledge, this is the smallest centrifugal pump in the world with an integrated electromagnetic synchronous motor that offers such high flow rates.

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Notes

  1. The so-called “air gap” is an expression which in general refers to the distance between the stator and the rotor of a motor, but sometimes can be filled with fluids rather than air.

  2. In micro-scale and specially where the clearances between moving and stationary parts are small, the viscosity –and the surface tension- of water counts and plays a big role, and should be taken in consideration.

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Acknowledgments

A scholarship for the first author by the German Academic Exchange Service (DAAD) is gratefully appreciated.

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Authors and Affiliations

  1. Institute of Microtechnology, Technische Universität Braunschweig, Alte Salzdahlumer Str. 203, 38106, Braunschweig, Germany

    M. Matar, A. T. Al-Halhouli, A. Dietzel & S. Büttgenbach

  2. Mechatronics Engineering Department, German-Jordanian University, P.O. Box 35247, Amman, 11180, Jordan

    A. T. Al-Halhouli

Authors
  1. M. Matar
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  2. A. T. Al-Halhouli
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  3. A. Dietzel
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  4. S. Büttgenbach
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Correspondence to A. T. Al-Halhouli.

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Matar, M., Al-Halhouli, A.T., Dietzel, A. et al. Microfabricated centrifugal pump driven by an integrated synchronous micromotor. Microsyst Technol 23, 2475–2483 (2017). https://doi.org/10.1007/s00542-016-3069-y

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  • DOI: https://doi.org/10.1007/s00542-016-3069-y

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