Skip to main content

Multi-frequency CMOS oscillator based on CMOS MEMS SAW resonator


This paper presents the design and simulation results for a multi-frequency oscillator based on complementary metal oxide semiconductor (CMOS) microelectromechanical systems (MEMS) surface acoustic wave (SAW) resonator. Multi-frequency oscillator is simulated using 0.35 µm CMOS technology. The oscillator operated at 600 and 1.76 GHz. The multi-frequency oscillator shows phase noise performance of −67.35 and −92.83 dBc/Hz at 100 kHz offset frequency for 600 MHz and 1.76 GHz, respectively, during simulation. The pierce circuit topology was used to sustain the oscillation from CMOS SAW resonator. The sustaining circuit was design and fabricated in 0.35 µm CMOS technology process with 3.3 V supply. The measured S21 of sustaining circuit topology are 6 and 2 dB at 1.76 GHz and 600 MHz, respectively. The phase responses for 1.76 GHz and 600 MHz are −50° and –200° correspondingly.

This is a preview of subscription content, access via your institution.

Fig. 1
Fig. 2
Fig. 3
Fig. 4
Fig. 5
Fig. 6
Fig. 7
Fig. 8
Fig. 9
Fig. 10
Fig. 11
Fig. 12
Fig. 13
Fig. 14


  1. Chengjie Z, Van Der Spiegel J, Piazza G (2010) 1.05-GHz CMOS oscillator based on lateral—field-excited piezoelectric AlN contour—mode MEMS resonators. IEEE Trans Ultrason Ferroelectr Freq Control 57(1):82–87

    Article  Google Scholar 

  2. DeMartini BE, Rhoads JF, Turner KL, Shaw SW, Moehlis J (2007) Linear and nonlinear tuning of parametrically excited MEMS oscillators. J Microelectromechanical Syst 16(2):310–318

    Article  Google Scholar 

  3. Kaajakari V, Koskinen JK, Mattila T (2005) Phase noise in capacitively coupled micromechanical oscillators. IEEE Trans Ultrason Ferroelectr Freq Control 52(12):2322–2331

    Article  Google Scholar 

  4. Karim J, Zainuddin AA, Nordin AN (2014) MEMS-based oscillators: a review. IIUM Eng J 15(1):1–15

  5. Lee JEY, Bahreyni B, Yong Z, Seshia AA (2008) A Single-crystal-silicon bulk-acoustic-mode microresonator oscillator. Electron Device Lett IEEE 29(7):701–703

    MATH  Article  Google Scholar 

  6. Nguyen CTC (2004) Vibrating RF MEMS for next generation wireless applications. In: Custom Integrated Circuits Conference. Proceedings of the IEEE 2004

  7. Nguyen CTC, Howe RT (1999) An integrated CMOS micromechanical resonator high-Q oscillator. Solid State Circuits IEEE J 34(4):440–455

    Article  Google Scholar 

  8. Nordin AN, Zaghloul ME (2007) Modeling and fabrication of CMOS surface acoustic wave resonators. Microwav Theor Tech IEEE Trans 55(5):992–1001

    Article  Google Scholar 

  9. Nordin AN, Zaghloul ME (2008) Design, implementation and characterization of temperature compensated SAW resonators in CMOS technology for RF oscillators. School of Engineering and Aplied Science. The George Washington University

  10. Nordin A, Zaghloul M (2011) RF oscillator implementation using integrated CMOS surface acoustic wave resonators. Analog Integr Circ Sig Process 68:33–42

  11. Otis BP (2004) The design and implementation of an ultra low power RF oscillator using micromachined resonators. In: Master of Science, plan II Department of Electrical Engineering and Computer Sciences, University of California

  12. Rhea RW (2010) Discrete oscillator design: linear, nonlinear, transient and noise domains. In: Artech House

  13. Salvia JC, Melamud R, Chandorkar SA, Lord SF, Kenny TW (2010) Real-time temperature compensation of MEMS oscillators using an integrated micro-oven and a phase-locked loop. Microelectromechanical Syst J 19(1):192–201

    Article  Google Scholar 

  14. Seungbae L, Nguyen CTC (2003) Influence of automatic level control on micromechanical resonator oscillator phase noise. In: Frequency control symposium and PDA exhibition jointly with the 17th European Frequency and Time Forum. Proceedings of the 2003 IEEE International

  15. Seungbae L, Nguyen CTC (2004) Mechanically-coupled micromechanical resonator arrays for improved phase noise. In: Frequency control symposium and exposition. Proceedings of the 2004 IEEE International

  16. Sidek F, Nordin AN, Zaghloul ME (2011) Development of an RF-CMOS surface acoustic wave (SAW) resonator. In: Circuits and systems (MWSCAS), IEEE 54th International Midwest Symposium on

  17. Sundaresan K, Ho GK, Pourkamali S, Ayazi F (2007) Electronically temperature compensated silicon bulk acoustic resonator reference oscillators. Solid State Circuits IEEE J 42(6):1425–1434

    Article  Google Scholar 

  18. Wan-Thai H (2006) Vibrating RF MEMS for timing and frequency references. In: Microwave symposium digest. IEEE MTT-S International

  19. Yamanouchi K, Odagawa H, Meguro T, Wagatsuma Y, Yamamoto K (1993) Nano-meter electrode fabrication technology using anodic oxidation resist and application to 20 GHz-range SAW devices. Proc IEEE Ultrason Symp (1):1263–1266

  20. Yu-Wei L, Seungbae L, Sheng-Shian L, Yuan X, Zeying R, Nguyen CTC (2004) Series-resonant VHF micromechanical resonator reference oscillators. Solid State Circuits IEEE J 39(12):2477–2491

    Article  Google Scholar 

Download references


This work was supported by the Exploratory Research Grant: ERGS11-009-009 provided by the Ministry of Higher Education of Malaysia.

Author information



Corresponding author

Correspondence to Anis Nurashikin Nordin.

Rights and permissions

Reprints and Permissions

About this article

Verify currency and authenticity via CrossMark

Cite this article

Karim, J., Zainuddin, A.A., Alam, A.H.M.Z. et al. Multi-frequency CMOS oscillator based on CMOS MEMS SAW resonator. Microsyst Technol 21, 1915–1922 (2015).

Download citation


  • Phase Noise
  • Surface Acoustic Wave
  • Complementary Metal Oxide Semiconductor
  • Beam Resonator
  • Phase Noise Performance