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Metal-based piezoelectric microelectromechanical systems scanner composed of Pb(Zr, Ti)O3 thin film on titanium substrate

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Abstract

We have developed a titanium (Ti)-based piezoelectric microelectromechanical systems scanner driven by a Pb(Zr, Ti)O3 (PZT) thin film for the development of laser scanning displays. The 2-μm-thick PZT thin film was directly deposited on a 50-μm-thick Ti substrate by radio frequency magnetron sputtering. Prior to PZT deposition, the Ti substrate was microfabricated into the shape of a horizontal scanner by wet etching; therefore, we could fabricate a piezoelectric microactuator without using the photolithography process. We confirmed the growth of the polycrystalline PZT film with perovskite structures on the Ti substrate. We achieved an optical scanning angle of 22° at a resonant frequency of 25.4 kHz using a driving voltage of 20 V pp. These horizontal scanning properties can be applicable for laser displays.

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Authors and Affiliations

  1. Department of Micro Engineering, Kyoto University, Yoshida-honmachi, Sakyo-ku, Kyoto, 606-8501, Japan

    Shuhei Matsushita, Ryuji Yokokawa & Hidetoshi Kotera

  2. Department of Mechanical Engineering, Kobe University, Rokkodai-cho, Nada-ku, Kobe, 657-8501, Japan

    Isaku Kanno & Kazuhiko Adachi

Authors
  1. Shuhei Matsushita
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  2. Isaku Kanno
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  3. Kazuhiko Adachi
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  4. Ryuji Yokokawa
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  5. Hidetoshi Kotera
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Correspondence to Isaku Kanno.

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Matsushita, S., Kanno, I., Adachi, K. et al. Metal-based piezoelectric microelectromechanical systems scanner composed of Pb(Zr, Ti)O3 thin film on titanium substrate. Microsyst Technol 18, 765–771 (2012). https://doi.org/10.1007/s00542-012-1462-8

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  • DOI: https://doi.org/10.1007/s00542-012-1462-8

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